Eui-Hyeok (EH) Yang, Ph.D

Director of Micro Device Laboratory (MDL)

Director of Nanoelectronics Technology Laboratory

Associate Professor, Nanotechnology Graduate Program, Green Engineering

Department of Mechanical Engineering, Stevens Institute of Technology

Castle Point on the Hudson, Hoboken, NJ 07030

Office: Carnegie 203, TEL: 201-216-5574, FAX: 201-216-8315

E-mail: eyang at stevens dot edu

URL: EH @ SoE, personal links, friends, family, EH @ News

Dr. Yang is currently an Associate Professor at Stevens Institute of Technology (Mechanical Engineering Department) and Director of Multi-User Micro Device Laboratory. He received his B.S., M.S., Ph.D. degrees at Ajou University (Microsystems Lab), Korea. In 1996, he joined the Fujita MEMS research group at the Institute of Industrial Science, University of Tokyo, Japan, as a Postdoctoral Scholar. Dr. Yang received a research fellowship from the Japan Society for the Promotion of Science from 1996 to 1998. After a brief stay at Electronics and Telecommunications Research Institute (ETRI) in 1998, he started his tenure at NASA’s Jet Propulsion Laboratory (JPL), where he initiated and led the development of MEMS actuator technology thrust. Dr. Yang was a Senior Member of the Engineering Staff and task manager for several technology development projects at JPL. He led the development of MEMS-based deformable mirrors and microactuators for future large aperture telescopes, and the development of MEMS-based piezoelectric valves for future microspacecraft applications. He was a technical monitor for a NASA SBIR project. Dr. Yang served as a Research Adviser for National Research Council (NRC) in the area of piezoelectric microactuators for active-mirror technologies. His current research interests include nanoscale structures and devices based on low dimensional materials including carbon nanotube and graphene for cross-disciplinary applications. Dr. Yang has published over 100 journal/conference papers in the field of MEMS and Nanotechnology, and has 11 provisional/non-provisional patents issued or pending. He is Associate Editor of IEEE Sensors Journal. In addition, he is actively involved in the ASME MEMS Division as Chair of IMECE Technical Committee. He is Track Chair of Micro and Nano Systems Track of the ASME International Mechanical Engineering Congress and Exposition 2009. He is currently an IEEE Senior Member and an ASME Member, and is also a member of the Technical Program Committee (TPC) for several international conferences. He received a number of awards at JPL, including NASA ICB Space Act Awards, Bonus (Level B and C) Awards and Class 1 NASA Tech Brief Awards. In recognition of his excellence in advancing the use of MEMS-based actuators for space applications, he received the prestigious Lew Allen Award for Excellence at JPL.

COURSES

ME 681: Applications of Advanced Micro/Nano Materials, Structures and Devices (Spring 2007, 2008, 2009)

ME 581: Introduction to BioMEMS (Fall 2007)

ME 682: Advanced Nanofabrication for Nanoelectronics

ME 483: Control Systems (Fall 2008, Spring 2009, Fall 2009)

AWARDS, HONORS AND RECOGNITION

- Lew Allen Award for Excellence (2004), NASA JPL (JPL News)

o Recognized for his excellence in advancing the use of Micro Electro Mechanical Systems–based actuators for space applications. Developed several significant areas of research in MEMS-based actuators for space applications, utilizing MEMS actuators for the development of high-pressure, low leak-rate microvalves, continuous membrane deformable mirrors and inchworm devices for segmented mirror assembly and control for large aperture, space-based telescopes.

- NASA ICB Space Act Award (2005), NASA JPL

- Level C Award (2003), NASA JPL

- NASA ICB Space Act Award (2002), NASA JPL

- Level B Award (2001), NASA JPL

- Class 1 NASA Tech Brief Awards (2001-2007), NASA JPL (>30 awards)

- Marquis Who’s Who in America

- Who’s Who in Engineering Academia

- Marquis Who’s Who

- Research Fellowship of the Japan Society for the Promotion of Science (1996-1998)

- Scholarship: B.S, M.S and Ph.D (1986-1995), Ajou University, Korea

- Summa Cum Laude Honor (1990), Ajou University, Korea

FUNDED PROJECTS

Competition

· Air Force Office of Scientific Research (PI)

· NASA SBIR Phase I, II (Co-PI)

· JPL Research and Technology Development (PI)

· National Reconnaissance Office, Director’s Innovation Initiatives (PI)

· DARPA TTO, Large Aperture Space Surveillance, Phase I (Co-PI)

· JPL Director's Research and Development Fund (PI)

· NASA NRA, Astrobiology Science and Technology Instrument Development, Bio/nano Technology Program (Co-PI)

· Caltech President Funding (Co-PI)

· NASA Gossamer Space Telescope Technology NRA (Co-PI)

· NSF Center for Adaptive Optics (PI)

Non-Competition

· US Army Armament Research Development & Engineering Center (PI)

· JPL Spontaneous Concepts, Director's Research and Development Fund (PI)

· National Reconnaissance Office (PI)

· NASA Code R Enabling Concepts and Technologies Program (PI)

· NASA Cross Enterprise Technology Development Program (PI)

· Industry funding (PI)

PROFESSIONAL EXPERIENCE

- Associate Professor: Stevens Institute of Technology: Sept. 2006 – Present

- Senior Member of Engineering Staff, Task Manager: NASA Jet Propulsion Laboratory: Oct. 2002 – Aug. 2006.

- Member of Engineering Staff, Task Manager: NASA Jet Propulsion Laboratory: March 2001 – Sept. 2002

- Caltech Postdoctoral Scholar at JPL: NASA Jet Propulsion Laboratory: Jan. 1999 – Feb. 2001

- Postdoctoral Research Staff: ETRI, Korea: Nov. 1998 – Dec. 1998

- Postdoctoral Fellow: IIS, University of Tokyo, Japan: June 1996 – July 1998

EDUCATION

- Ph.D: Control and Instrumentation Engineering, Ajou University, Korea

o A Study on the Stress Determination of p+ Silicon Films and Its Application to Microelectromechanical Systems, Related publication

- M.S: Control and Instrumentation Engineering, Ajou University, Korea

o A Study on a Silicon Resonator for Piezoresistive Accelerometers

- B.S: Control and Instrumentation Engineering, Ajou University, Korea

PROFESSIONAL SOCIETY

• Senior Member: The Institute of Electronics and Electrical Engineers (IEEE): Technical Program Committee, Session Chair

• Member: American Society of Mechanical Engineers (ASME): Technical Committee Chair, Track Chair, Symposium Chair, Session Chair

• The International Society for Optical Engineering (SPIE): Program Committee, Session Chair

PROFESSIONAL SERVICES

Associate Editor: IEEE Sensors Journal.

Chair, Fabrication Packaging and Materials Technical Committee, ASME MEMS Division

Chair, IMECE Technical Committee, ASME MEMS Division

Track Chair, Micro and Nano Systems Track, IMECE 2009

Technical Program Committee

· SPIE Defense and Security Symposium (MEMS and Nanotechnology)

· IEEE Sensors Conference

Organizer

· Micro and Nano Devices Symposium, ASME International Mechanical Engineering Congress and Exposition 2005~Present

· Metro Area MEMS/NEMS workshop, 2007

Session Chair

· ASME International Mechanical Engineering Congress and Exposition, 2005~2009

· SPIE Defense and Security Symposium (MEMS and Nanotechnology), 2007, 2009

· IEEE Sensors Conference, 2005, 2006

· SPIE MEMS/MOEMS Components and Their Applications Conference, 2004, 2005

Reviewer

· Journals: IEEE Sensors Journal, IEEE/ASME Journal of Microelectromechanical Systems, IEEE/ASME Mechatronics, IEEE EDS Electron Device Letters, IOP Journal of Physics: Condensed Matter, IOP Journal of Physics D: Applied Physics, IOP Journal of Micromechanics and Microengineering, IOP Nanotechnology, IOP Journal of Optics A: Pure and Applied Optics, IOP Measurement Scienece and Technology, Sensors and Actuators A, Micromechatronics, Journal of Sensors and Materials, Optics Communications, Microfluidics and Nanofluidics, International Journal of Optomechatronics, Electroanalysis, Journal of Abrasive Technology, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3)

· Conferences: IEEE Sensors Conference, ASME International Mechanical Engineering Congress and Exposition, SPIE Defense and Security Symposium

· Proposals: NSF CAREER panel (Micro and Nano Systems, Biological and Chemical Separation), NASA SBIR Phase I and II, JPL Research and Technology Development, Ireland Science Foundation, Cooperative Grants Program (CGP)-A of the U.S. Civilian Research and Development Foundation (CRDF), ACS Petroleum Research Fund, Army Research Office

· Projects: Multi Object Spectrometer (MOS) for NASA’s James Webb Space Telescope (JWST)

INSTITUTIONAL SERVICES

· Director: Micro Devices Laboratory

· Undergraduate Promotions Committee

· Faculty Academic Entrepreneurship Task Force

· ME Department Research Committee

· Dissertation Committee

US PATENTS

1. E.H. Yang, L. Wild, N. Rohatgi and D. Bame, “A Piezoelectric Microvalve under Ultra-High Upstream Pressure for Integrated Micropropulsion and Method for Operating the Same”, Currently under review by NASA

2. C. P. Search, S. Strauf and E.H. Yang, “Phase Coherent Solid State Electron Gyroscope Array,”  U.S. Provisional Patent Application being filed

3. N. Gao, H. Wang and E.H. Yang, “A highly efficient cell separation technique using antibody functionalized magnetic nanowires,” U.S. Provisional Patent Application filed in Nov. 2009.

4. O. Sul, R. Dutta, and E.H. Yang, “A Nanowire-based Ultra-High Frequency Diode for Solar Energy Harvesting,” U.S. Provisional Patent Application Filed:  5/14/2009, Serial # 61/216,200

5. S. Lee and S. S. Lee, and E.H. Yang, “A Planner Vacuum Transistor Based on Graphene Field Emissions,” U.S. Provisional Patent Filed:  5/15/2009, Serial # 61/216,298

6. K. Kumar and E.H. Yang, “A High-throughput Local Oxidation Patterning Process,”  U.S. Provisional Patent Filed: 3/27/2009, Serial # 61/164,101

7. E.H. Yang, D. Choi, S. Bae, and C. Ramsey, “Fabrication of Copper Nanotubes by Electrochemical Deposition, and Copper Nanotubes Made Therefrom,” NASA Case No. NPO-42261-1: Government Owned Invention filed by NASA

8. E.H. Yang, “A PZT Bimorph based, High Stroke MEMS Deformable Mirror with a Continuous Membrane for Active Optical Systems” US 7,336,412 B2 US Patent

9. E.H. Yang, “Wafer Level Transfer of Membranes with Gas-Phase Etching and Wet Etching Methods,” US 7,268,081 US Patent

10. W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Optically Powered And Optically Data-Transmitting Wireless Intraocular Pressure Sensor Device,” US 7,131,945 B2 US Patent

11. E.H. Yang and D. Wiberg, “A Wafer-Level Transfer of Membranes in Semiconductor Processing,” US 6,777,312 B2 US Patent

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