Applications of
Advanced Micro/Nano Materials,
Structures and Devices
School
of Engineering and Science
Spring
2017
Meeting
Time: Friday 3:00pm – 5:30pm
Classroom
Location: C207 (F)
Instructor:
Eui-Hyeok (EH) Yang
Contact
Info: Carnegie 206, eyang@stevens.edu,
201-216-5574
Office
Hours: Friday 10am – 1:00pm
Course
Web Address: None
Prerequisite(s):
ME573 or instructor permission
Corequisite(s):
None
Cross-listed
with: None
COURSE
DESCRIPTION
The
goals of this course are to go beyond the introduction stage in
Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems
(NEMS) to provide students with a strong background in design and
characterization of micro and nano scale sensors and actuators with a broad range of applications
in CNT and graphene-based sensors, actuators and devices, biomedical systems,
micro- and nanoscale manipulation, adaptive optics, and microfluidics. The main
focus is to understand the fundamental challenges and limitations involved in
designing and demonstrating micro and nano devices and systems.
LEARNING
OBJECTIVES
After successful completion of this
course, students will be able to
·
demonstrate knowledge of
designing, fabricating and characterizing:
–
Micro-Electro-Mechanical
Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS)
–
Carbon Nannotubes
and graphene-based devices
–
Microactuators and microfluidic devices
·
develop presentation and
reporting skills
[SES Outcome 2 Engineering Foundations - the ability to use applied
scientific knowledge (ABET Criterion 3-e)].
FORMAT
AND STRUCTURE
·
This course is comprised of weekly
lectures with extensive hands-on course projects embedded in the lectures.
COURSE
MATERIALS
We will use a combination of selections from references books, MEMS journal publications and on-line information.
COURSE
REQUIREMENTS
Attendance All
students start the semester 10 points for attendance. A student will lose 1
points for each additional absences. Excused absences (religious or medical,
noted in via email to the professor prior to the absence occurring) accompanied
by proper documentation will not lead to point deductions.
Case Study Each student is expected to make a presentation on a selected topic by (a) identifying the relevant research literature representing the state of the art on a specific research subject, (b) structuring, summarizing and critiquing this body of literature, and (c) drawing conclusions from and evaluating the significance and impact of this body of literature.
Term Project Students will experience hands-on projects including the device design, mask design, process design (fabrication), or modeling, and characterization.
Quiz Several
quizzes will be given during the class.
GRADING
PROCEDURES
· There are 10 possible points that a student can earn in this course. The final grade will be based on the number of points earned out of the number of points possible. Percentages are also listed below.
ACADEMIC
INTEGRITY
Undergraduate Honor System
Enrollment
into the undergraduate class of Stevens Institute of Technology signifies a
student's commitment to the Honor System. Accordingly, the provisions of the
Stevens Honor System apply to all undergraduate students in coursework and
Honor Board proceedings. It is the responsibility of each student to become
acquainted with and to uphold the ideals set forth in the Honor
System Constitution. More information about the Honor System
including the constitution, bylaws, investigative procedures, and the penalty
matrix can be found online at http://web.stevens.edu/honor/
The following pledge shall be
written in full and signed by every student on all submitted work (including,
but not limited to, homework, projects, lab reports, code, quizzes and exams)
that is assigned by the course instructor. No work shall be graded unless the
pledge is written in full and signed.
“I pledge my honor that I have abided by the Stevens Honor System.”
Reporting Honor System Violations
Students who believe a violation of
the Honor System has been committed should report it within ten business days
of the suspected violation. Students have the option to remain anonymous and
can report violations online at www.stevens.edu/honor.
Graduate Student Code of Academic
Integrity
All
Stevens graduate students promise to be fully truthful and avoid dishonesty,
fraud, misrepresentation, and deceit of any type in relation to their academic
work. A student’s submission of work for academic credit indicates that the
work is the student's own. All outside assistance must be acknowledged. Any
student who violates this code or who knowingly assists another student in
violating this code shall be subject to discipline.
All graduate students are bound to
the Graduate Student Code of Academic Integrity by enrollment in graduate
coursework at Stevens. It is the responsibility of each graduate student to
understand and adhere to the Graduate Student Code of Academic Integrity. More
information including types of violations, the process for handling perceived
violations, and types of sanctions can be found at www.stevens.edu/provost/graduate-academics.
Special Provisions for Undergraduate
Students in 500-level Courses
The general provisions of the
Stevens Honor System do not apply fully to graduate courses, 500 level or
otherwise. Any student who wishes to report an undergraduate for a violation in
a 500-level course shall submit the report to the Honor Board following the
protocol for undergraduate courses, and an investigation will be conducted
following the same process for an appeal on false accusation described in Section
8.04 of the Bylaws of the Honor System. Any student who wishes to report a
graduate student may submit the report to the Dean of Graduate Academics or to
the Honor Board, who will refer the report to the Dean. The Honor Board
Chairman will give the Dean of Graduate Academics weekly updates on the
progress of any casework relating to 500-level courses. For more information
about the scope, penalties, and procedures pertaining to undergraduate students
in 500-level courses, see Section 9 of the Bylaws of
the Honor System document, located on the Honor Board website.
EXAM
ROOM CONDITIONS
The
following procedures apply to quizzes and exams for this course. As the
instructor, I reserve the right to modify any conditions set forth below by
printing revised Exam Room Conditions on the quiz or exam.
1.
Students may use the following devices
during quizzes and exams. Any electronic devices that are not mentioned in the
list below are not permitted.
Device |
Permitted? |
|
Yes |
No |
|
Laptops |
|
x |
Cell Phones |
|
x |
Tablets |
|
x |
Smart Watches |
|
x |
Google Glass |
|
x |
Other (Nonprogrammable calculator) |
|
x |
2.
Students may use the following materials
during quizzes and exams. Any materials that are not mentioned in the list
below are not permitted.
Material |
Permitted? |
|
Yes |
No |
|
Handwritten Notes |
|
x |
Typed Notes; Conditions: one 8x10 sheet (Times 11 and black) is permitted. |
|
x |
Textbooks |
|
x |
Readings |
|
x |
3.
Students are not allowed to work
with or talk to other students during quizzes and/or exams.
LEARNING
ACCOMODATIONS
Stevens Institute of Technology is dedicated to
providing appropriate accommodations to students with documented disabilities.
Student Counseling and Disability Services works with undergraduate and
graduate students with learning disabilities, attention deficit-hyperactivity
disorders, physical disabilities, sensory impairments, and psychiatric
disorders in order to help students achieve their academic and personal
potential. They facilitate equal access to the educational programs and
opportunities offered at Stevens and coordinate reasonable accommodations for
eligible students. These services are designed to encourage independence and
self-advocacy with support from SCDS staff. The SCDS staff
will facilitate the provision of accommodations on a case-by-case basis. These
academic accommodations are provided at no cost to the student.
Disability Services
Confidentiality Policy
Student Disability
Files are kept separate from academic files and are stored in a secure location
within the office of Student Counseling, Psychological & Disability
Services. The Family Educational Rights Privacy Act (FERPA, 20 U.S.C. 1232g;
34CFR, Part 99) regulates disclosure of disability documentation and records
maintained by Stevens Disability Services. According to this act, prior written
consent by the student is required before our Disability Services office may
release disability documentation or records to anyone. An exception is made in
unusual circumstances, such as the case of health and safety emergencies.
For
more information about Disability Services and the process to receive
accommodations, visit https://www.stevens.edu/sit/counseling/disability-services. If you have any questions please contact:
Lauren
Poleyeff, Psy.M., LCSW - Diability Services Coordinator and Staff Clinician in
Student Counseling and Disability Services at Stevens Institute of Technology
at lpoleyef@stevens.edu or by phone (201) 216-8728.
INCLUSIVITY
STATEMENT
Stevens
Institute of Technology believes that diversity and inclusiveness are essential
to excellence in education and innovation. Our community represents a rich
variety of backgrounds, experiences, demographics and perspectives and Stevens
is committed to fostering a learning environment where every individual is
respected and engaged. To facilitate a dynamic and inclusive educational
experience, we ask all members of the community to:
·
be open to the perspectives of others
·
appreciate the uniqueness their
colleagues
·
take advantage of the opportunity to learn
from each other
·
exchange experiences, values and beliefs
·
communicate in a respectful manner
·
be aware of individuals who are
marginalized and involve them
·
keep confidential discussions private
COURSE
SCHEDULE
The following is a tentative course schedule. Any and
all changes to this schedule will be communicated to you 1) in class and 2) via
email.
Topic(s) |
Presentation
and Term-projects |
Description |
|
Intro to Advanced MEMS/NEMS |
Case study assignment |
Course introduction, case study and term-project/device design |
|
2 |
Micro/nano fabrication I |
|
Micro and nano patterning, advanced lithography |
3 |
Micro/nano fabrication II |
|
Surface and
bulk micromachining, device examples |
4 |
Term-project: concept presentation |
||
5 |
MEMS devices and applications I |
Case study Presentation |
MEMS adaptive optics, deformable mirrors, piezoelectric films |
6 |
MEMS devices and applications II |
Case study Presentation |
MEMS actuators, comb drive actuators for large-scale space apertures |
7 |
MEMS devices and applications III |
Case study Presentation |
Piezoelectric stacks, microvalves for microspacecrafts |
8 |
Droplet microfluidics |
|
Microfluidics, droplet microfluidics, smart polymer and applications |
9 |
Term-project: mid-term presentation |
||
10 |
Nanoscale Characterization |
|
Nanoscale characterization using AFM, Raman, SEM |
11 |
Carbon nanotubes |
|
Carbon nanotubes - synthesis, devices and energy storage applications |
12 |
Graphene |
|
Graphene
synthesis, devices and energy storage applications |
13 |
2D
materials |
|
Synthesis,
devices and energy storage applications of TMDs |
14 |
Term-Project Poster Presentations, Case study paper due |