ME
682: Advanced Nanofabrication for Nanoelectronics
Catalog Description:
This course will address the basic concepts of
nanoelectronics, including fundamental principles, novel electronic materials, novel
fabrication techniques and devices. In particular, it will focus on novel
nanofabrication techniques including nanolithography, growth and assembly
processes, and
characterization techniques to validate its fabrication process related to the
area of Nanoelectronics. It will also address the technical issues to develop
nano-scale elements/devices including single
electron devices, carbon nanotubes as interconnects or transistors, nanowires,
graphene materials and devices, spintronic applications and eventually complex
organic molecules as memory and logic units.
Goals: The
course is to introduce students to the area of Nanoelectronics,
concentrating on
its nanofabrication techniques such as nanolithography, growth and assembly
of nanostructures.
Outcomes:
Students will be able to a) design and analyze basic nanoelectronics
devices such as single electron transistors and b) understand the
nanofabrication techniques associated with the nanoelectronics devices such as single
electron devices, carbon nanotube electronics, next generation memory and
storage devices and sensor arrays.
Prerequisites: ME 573 or Permission of instructor
Cross-listing: NANO —
show cross-listed course number(s)
Percentages for: HW 20% , Projects 50%, Case Study 30%
Course’s Objective: The course is
intended to provide an introduction to novel nanofabrication techniques and nanoscale device technologies for Nanoelectronic
applications. In addition to understanding the nanofabrication processes, the
design aspect of nanoscale devices will also be addressed. The student will
leave the course with a general understanding of the current state-of-the-art
nanofabrication techniques for nanoelectronics devices as well as basic skills
for continuation into advanced design and fabrication.
Textbook(s)
or References: Nanoelectronics and Information Technology
(ISBN-13: 978-3-527-40542-8, ISBN-10: 3-527-40542-9), WILEY-VCH, 2005: In
addition, we will use a combination of selections from references books,
journal publications and on-line information.
Syllabus:
|
Topic(s) |
Homework: |
Presentation and
Term-projects |
Description |
Week 1 |
Introduction |
|
|
§ Course Introduction § Nanoelectronics,
definition and impact |
Week 2 |
Background on solid
state electronics |
Chapter I |
Case study assignment |
§ Fermi surface and
band structures § Field-effect
transistors, charge control model |
Week 3 |
Fabrication of
nanoscale building blocks |
Chapter II |
|
§ E-beam, AFM, STM,
dip-pen, nanoimprint, self-assembly |
Week 4 |
Characterization of
nanoscale building blocks |
Chapter II |
Term-Project
assignment |
§ Materials and
device characterization, |
Week 5 |
Single electron
devices I |
Chapter III |
Case study
presentation |
§ Coulomb blockade § Fabrication issues
for logic and memory applications |
Week 6 |
Single electron
devices II |
Chapter III |
Case study
presentation |
§ Device examples |
Week 7 |
Project Review |
|
Term-project
proposal |
§ Review |
Week 8 |
Graphene and carbon
nanotubes I |
Chapter III |
Case study
presentation |
§ Material structures
and properties § Electric and mechanical
properties |
Week 9 |
Graphene and carbon
nanotubes II |
Chapter III |
Case study
presentation |
§ FET, inverter,
oscillator, optics, emitters, chemical sensors § NEMS |
Week 10 |
Semiconductor
nanowires I |
Reference |
Case study
presentation |
§ Growth § Heterostructures |
Week 11 |
Semiconductor
nanowires II |
Reference |
Case study
presentation |
§ Assembly,
biosensors, environmental sensors, solar cells, lasers |
Week 12 |
Molecular
electronics |
Chapter III |
Case study
presentation |
§ Single molecule
devices § Memory devices |
Week 13 |
Spintronics |
Chapter IV |
|
§ Spin-FET, spin
valves and MRAM |
Week 14 |
Term project |
|
Poster
Presentations |
§ Term-Project Poster
and Oral Presentations |