Notes
Slide Show
Outline
1
DM based on PZT Unimorph Actuator
2
Unimorph Actuation
3
Preliminary DM: Testing
4
Large-Area DM Fabrication:
Wafer-Scale Membrane Transfer
5
2nd Generation DM with 20x20 PZT Unimorph Actuators
6
Other Characteristics
Notes
