National Aeronautics and Space Administration
Jet Propulsion
Laboratory
California
Institute of Technology
•Piezoelectric unimorph actuators:
•Large wavefront correction, with
a highly localized influence function.
•Microactuators that are highly
scalable, potentially up to 104 actuators.
•Fast
response and low power (30 ms/cycle,
4 nF)
•Functional at cryogenic
temperatures (15% loss of
piezoelectricity at 150K).
V
SOI wafer
Device Silicon 10~20µm thick
Bottom
Electrode (Ti/Pt)
PZT film
(1~5µm)
Top Electrode (Cr/Pt/Au)
DM based on PZT
Unimorph Actuator