National Aeronautics and Space Administration
Jet Propulsion
Laboratory
California
Institute of Technology
Bistable beam
Meandered flexure
Slider
Holder
Driver
(moves vertically by external PZT)
SOI substrate
Slider moves
vertically (out of
plane)
Holder
Footprint 2mmx4mm
•Slider is clutched with holder and driver by electrostatic force
- This version is not of self-latching.
•Driver is pushed by external PZT for vertical movement
R. Toda and E. H. Yang, ¡°Fabrication and Characterization of Vertical Inchworm Microactuator,¡± Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California, November 13-19, 2004.
1st Generation Microactuator