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Applications of Advanced Micro/Nano Materials, Structures and Devices

School of Engineering and Science

Spring 2017

 

Meeting Time:            Friday 3:00pm – 5:30pm

Classroom Location:   C207 (F)

Instructor:                   Eui-Hyeok (EH) Yang           

Contact Info:               Carnegie 206, eyang@stevens.edu, 201-216-5574

Office Hours:              Friday 10am – 1:00pm

Course Web Address: None

Prerequisite(s):            ME573 or instructor permission

Corequisite(s):            None

Cross-listed with:        None

 

COURSE DESCRIPTION

The goals of this course are to go beyond the introduction stage in Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) to provide students with a strong background in design and characterization of micro and nano scale sensors and actuators with a broad range of applications in CNT and graphene-based sensors, actuators and devices, biomedical systems, micro- and nanoscale manipulation, adaptive optics, and microfluidics. The main focus is to understand the fundamental challenges and limitations involved in designing and demonstrating micro and nano devices and systems.

 

LEARNING OBJECTIVES

After successful completion of this course, students will be able to

·         demonstrate knowledge of designing, fabricating and characterizing:

–        Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS)

–        Carbon Nannotubes and graphene-based devices

–        Microactuators and microfluidic devices

·         develop presentation and reporting skills

[SES Outcome 2 Engineering Foundations - the ability to use applied scientific knowledge (ABET Criterion 3-e)].

 

FORMAT AND STRUCTURE

·         This course is comprised of weekly lectures with extensive hands-on course projects embedded in the lectures.

 

COURSE MATERIALS

We will use a combination of selections from references books, MEMS journal publications and on-line information.

 

COURSE REQUIREMENTS

Attendance     All students start the semester 10 points for attendance. A student will lose 1 points for each additional absences. Excused absences (religious or medical, noted in via email to the professor prior to the absence occurring) accompanied by proper documentation will not lead to point deductions.

Case Study     Each student is expected to make a presentation on a selected topic by (a) identifying the relevant research literature representing the state of the art on a specific research subject, (b) structuring, summarizing and critiquing this body of literature, and (c) drawing conclusions from and evaluating the significance and impact of this body of literature.

Term Project Students will experience hands-on projects including the device design, mask design, process design (fabrication), or modeling, and characterization.

Quiz                Several quizzes will be given during the class.

 

GRADING PROCEDURES

·         There are 10 possible points that a student can earn in this course. The final grade will be based on the number of points earned out of the number of points possible. Percentages are also listed below.

 

 

ACADEMIC INTEGRITY

Undergraduate Honor System

Enrollment into the undergraduate class of Stevens Institute of Technology signifies a student's commitment to the Honor System. Accordingly, the provisions of the Stevens Honor System apply to all undergraduate students in coursework and Honor Board proceedings. It is the responsibility of each student to become acquainted with and to uphold the ideals set forth in the Honor System Constitution. More information about the Honor System including the constitution, bylaws, investigative procedures, and the penalty matrix can be found online at http://web.stevens.edu/honor/

 

The following pledge shall be written in full and signed by every student on all submitted work (including, but not limited to, homework, projects, lab reports, code, quizzes and exams) that is assigned by the course instructor. No work shall be graded unless the pledge is written in full and signed.

 

“I pledge my honor that I have abided by the Stevens Honor System

 

Reporting Honor System Violations

Students who believe a violation of the Honor System has been committed should report it within ten business days of the suspected violation. Students have the option to remain anonymous and can report violations online at www.stevens.edu/honor.

 

Graduate Student Code of Academic Integrity

All Stevens graduate students promise to be fully truthful and avoid dishonesty, fraud, misrepresentation, and deceit of any type in relation to their academic work. A student’s submission of work for academic credit indicates that the work is the student's own. All outside assistance must be acknowledged. Any student who violates this code or who knowingly assists another student in violating this code shall be subject to discipline.

All graduate students are bound to the Graduate Student Code of Academic Integrity by enrollment in graduate coursework at Stevens. It is the responsibility of each graduate student to understand and adhere to the Graduate Student Code of Academic Integrity. More information including types of violations, the process for handling perceived violations, and types of sanctions can be found at www.stevens.edu/provost/graduate-academics.

 

Special Provisions for Undergraduate Students in 500-level Courses

The general provisions of the Stevens Honor System do not apply fully to graduate courses, 500 level or otherwise. Any student who wishes to report an undergraduate for a violation in a 500-level course shall submit the report to the Honor Board following the protocol for undergraduate courses, and an investigation will be conducted following the same process for an appeal on false accusation described in Section 8.04 of the Bylaws of the Honor System. Any student who wishes to report a graduate student may submit the report to the Dean of Graduate Academics or to the Honor Board, who will refer the report to the Dean. The Honor Board Chairman will give the Dean of Graduate Academics weekly updates on the progress of any casework relating to 500-level courses. For more information about the scope, penalties, and procedures pertaining to undergraduate students in 500-level courses, see Section 9 of the Bylaws of the Honor System document, located on the Honor Board website.

 

EXAM ROOM CONDITIONS

The following procedures apply to quizzes and exams for this course. As the instructor, I reserve the right to modify any conditions set forth below by printing revised Exam Room Conditions on the quiz or exam.

 

1.      Students may use the following devices during quizzes and exams. Any electronic devices that are not mentioned in the list below are not permitted.

Device

Permitted?

Yes

No

Laptops

 

x

Cell Phones                

 

x

Tablets

 

x

Smart Watches

 

x

Google Glass              

 

x

Other (Nonprogrammable calculator)

 

x

 

 

 

 

 

 

 

 

 

2.      Students may use the following materials during quizzes and exams. Any materials that are not mentioned in the list below are not permitted.

Material

Permitted?

Yes

No

Handwritten Notes

 

x

Typed Notes; Conditions: one 8x10 sheet (Times 11 and black) is permitted.

 

x

Textbooks

 

x

Readings

 

x

 

 

 

 

 

 

 

3.      Students are not allowed to work with or talk to other students during quizzes and/or exams.

 

LEARNING ACCOMODATIONS

Stevens Institute of Technology is dedicated to providing appropriate accommodations to students with documented disabilities. Student Counseling and Disability Services works with undergraduate and graduate students with learning disabilities, attention deficit-hyperactivity disorders, physical disabilities, sensory impairments, and psychiatric disorders in order to help students achieve their academic and personal potential. They facilitate equal access to the educational programs and opportunities offered at Stevens and coordinate reasonable accommodations for eligible students. These services are designed to encourage independence and self-advocacy with support from SCDS staff.  The SCDS staff will facilitate the provision of accommodations on a case-by-case basis. These academic accommodations are provided at no cost to the student.

 

Disability Services Confidentiality Policy

Student Disability Files are kept separate from academic files and are stored in a secure location within the office of Student Counseling, Psychological & Disability Services. The Family Educational Rights Privacy Act (FERPA, 20 U.S.C. 1232g; 34CFR, Part 99) regulates disclosure of disability documentation and records maintained by Stevens Disability Services. According to this act, prior written consent by the student is required before our Disability Services office may release disability documentation or records to anyone. An exception is made in unusual circumstances, such as the case of health and safety emergencies.

 

For more information about Disability Services and the process to receive accommodations, visit https://www.stevens.edu/sit/counseling/disability-services. If you have any questions please contact:

Lauren Poleyeff, Psy.M., LCSW - Diability Services Coordinator and Staff Clinician in Student Counseling and Disability Services at Stevens Institute of Technology at lpoleyef@stevens.edu or by phone (201) 216-8728.

 

INCLUSIVITY STATEMENT

Stevens Institute of Technology believes that diversity and inclusiveness are essential to excellence in education and innovation. Our community represents a rich variety of backgrounds, experiences, demographics and perspectives and Stevens is committed to fostering a learning environment where every individual is respected and engaged. To facilitate a dynamic and inclusive educational experience, we ask all members of the community to:

·         be open to the perspectives of others

·         appreciate the uniqueness their colleagues 

·         take advantage of the opportunity to learn from each other       

·         exchange experiences, values and beliefs

·         communicate in a respectful manner

·         be aware of individuals who are marginalized and involve them

·         keep confidential discussions private 

 

COURSE SCHEDULE

The following is a tentative course schedule. Any and all changes to this schedule will be communicated to you 1) in class and 2) via email.

 

Week Starting

Topic(s)

Presentation and Term-projects

Description

1

Intro to Advanced MEMS/NEMS

Case study assignment

Course introduction, case study and term-project/device design

2

Micro/nano fabrication I

 

Micro and nano patterning, advanced lithography

3

Micro/nano fabrication II

 

Surface and bulk micromachining, device examples

4

Term-project: concept presentation

5

MEMS devices and applications I

Case study Presentation

MEMS adaptive optics, deformable mirrors, piezoelectric films

6

MEMS devices and applications II

Case study Presentation

MEMS actuators, comb drive actuators for large-scale space apertures

7

MEMS devices and applications III

Case study Presentation

Piezoelectric stacks, microvalves for microspacecrafts

8

Droplet microfluidics

 

Microfluidics, droplet microfluidics, smart polymer and applications

9

Term-project: mid-term presentation

10

Nanoscale Characterization

 

Nanoscale characterization using AFM, Raman, SEM

11

Carbon nanotubes

 

Carbon nanotubes - synthesis, devices and energy storage applications

12

Graphene

 

Graphene synthesis, devices and energy storage applications

13

2D materials

 

Synthesis, devices and energy storage applications of TMDs

14

Term-Project Poster Presentations, Case study paper due