ME 681: Applications of Advanced Micro/Nano Materials, Structures, and Devices

Catalog Description: The goals of this course are to go beyond the introduction stage in Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) to provide students with a strong background in design and characterization of micro and nano scale sensors and actuators with a broad range of applications in CNT-based sensors, actuators and devices, biomedical systems, micro- and nanoscale manipulation, adaptive optics, and microfluidics. The main focus is to understand the fundamental challenges and limitations involved in designing and demonstrating micro and nano devices and systems.

Prerequisites: ME 573 or equivalent

Cross-listing: NANO

Percentages for: 10% Homework, 20% Quiz, 30% Case Study, 40% Project

Course’s Objective:

· Students will be able to communicate the most updated challenges in the micro and nano technology area, based on the understanding of the fundamental detection and actuation principles.

· Students will be able to design, evaluate and select mask layout, process sequence, and characterization techniques that enable advanced micro and nano systems.

Textbook(s) or References:

We will use a combination of selections from MEMS/NEMS journal and conference publications and on-line information.

References Books:

M. Madou, Fundamentals of Microfabrication, CRC Press, 1997

Stephen D. Senturia, Microsystem Design, Kluwer Academic Publishers

G. Kovacs, Micromachined Transducers, McGraw-Hill, 1998

L. Ristic, Sensor Technology and Devices, Artech House, 1994

S. M. Sze, Semiconductor Sensors, John Wiley and Sons, 1994

Journals:

J. Microelectromechanical Systems (IEEE/ASME)

Sensors and Actuators (Elsevier)

J. Micromechanics and Microengineering (IOP)

Nanotechnology (IOP)

Nanoletter (ACS)

Conference Proceedings:

Transducers (International Conference on Solid-State Sensors and Actuators), odd-numbered years since 1983, proceedings available from IEEE (US Meetings)

MEMS (IEEE Workshop on Micro Electro Mechanical Systems), annual since 1989.

Solid-State Sensors and Actuators Workshop, Hilton Head, SC, even-numbered years since 1984, proceedings available from Transducer Research Foundation.

Syllabus:

	Topic(s)	Homework, Presentation and Term-projects	Description
Week 1	Intro to Advanced MEMS/NEMS		Course Introduction, Introduction of case study, presentation and term-project
Week 2	Mask layout and design Micro/nano fabrication I	§ L-Edit Exercise  § Case study assignment	§ Device design and mask design § Wafer treatment, photolithography
Week 3	Micro/nano fabrication II	Term-project concept presentation	§ Etching, deposition, bonding § Project concept
Week 4	Micro/nano fabrication III		Advanced lithography and non-conventional micro and nano machining
Week 5	MEMS/NEMS devices and applications I	Case study Presentation	MEMS adaptive optics (microvalves)
Week 6	MEMS/NEMS devices and applications II	Case study Presentation	MEMS actuators (microvalves)
Week 7	Term-project proposal presentation		Presentations on term-project proposals
Week 8	MEMS/NEMS devices and applications III	Case study Presentation	Nanochannels, nanowires, and other nanostructures
Week 9	MEMS/NEMS devices and applications IV	Case study Presentation	Biomedical engineering and energy conversion
Week 10	Carbon nanotube I	Case study Presentation	Materials, characteristics, fabrication, and applications
Week 11	Carbon nanotube II	Case study Presentation	CNT nanoelectronics, FETs, SETs
Week 12	Nanobio sensors	Case study Presentation	Definitions, mechanical, electrical, optical, and applications
Week 13	Nanostructure assembly		Nanoscale assembly, nanoactuators
Week 14	Final Presentation	Term-Project Poster Presentations	Term-Project Poster Presentations

Prof. E. H. Yang, Stevens Institute of Technology , 스티븐스 공대, 양의혁 교수

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