ME 681: Applications of Advanced Micro/Nano Materials, Structures, and Devices


Catalog Description:  The goals of this course are to go beyond the introduction stage in Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) to provide students with a strong background in design and characterization of micro and nano scale sensors and actuators with a broad range of applications in CNT-based sensors, actuators and devices, biomedical systems, micro- and nanoscale manipulation, adaptive optics, and microfluidics.  The main focus is to understand the fundamental challenges and limitations involved in designing and demonstrating micro and nano devices and systems.


Prerequisites:  ME 573 or equivalent

Cross-listing: NANO

Percentages for:  20% Quiz, 20% Case Study (presentation), 60% Project (10% mid-term presentation, 10% progress report, 20% poster presentation, and 20% final report)


Course’s Objective: 

·       Students will be able to communicate the most updated challenges in the micro and nano technology area, based on the understanding of the fundamental detection and actuation principles.

·       Students will be able to design, evaluate and select mask layout, process sequence, and characterization techniques that enable advanced micro and nano systems.

Textbook(s) or References: 


We will use a combination of selections from MEMS/NEMS journal and conference publications and on-line information.


References Books:

M. Madou, Fundamentals of Microfabrication, CRC Press, 1997

Stephen D. Senturia, Microsystem Design, Kluwer Academic Publishers

G. Kovacs, Micromachined Transducers, McGraw-Hill, 1998

L. Ristic, Sensor Technology and Devices, Artech House, 1994

S. M. Sze, Semiconductor Sensors, John Wiley and Sons, 1994


J. Microelectromechanical Systems (IEEE/ASME)

Sensors and Actuators (Elsevier)

J. Micromechanics and Microengineering (IOP)

Nanotechnology (IOP)

Nanoletter (ACS)

Conference Proceedings:

Transducers (International Conference on Solid-State Sensors and Actuators), odd-numbered years since 1983, proceedings available from IEEE (US Meetings)

MEMS (IEEE Workshop on Micro Electro Mechanical Systems), annual since 1989.

Solid-State Sensors and Actuators Workshop, Hilton Head, SC, even-numbered years since 1984, proceedings available from Transducer Research Foundation.




Presentations, reports and Quiz


Week 1

Intro to Advanced MEMS/NEMS


Course Introduction, Introduction of case study, presentation and term-project

Week 2

Mask layout and design

Micro/nano fabrication I

Case study assignment

Device design and mask design, and photolithography

Week 3

Micro/nano fabrication II


Nanolithography techniques (EBL, NIL)

Week 4

Micro/nano fabrication III

Term-project concept presentation

DRIE, and non-conventional micromachining

Week 5

MEMS/NEMS devices and applications I


MEMS adaptive optics: deformable mirrors and linear actuators 

Week 6

MEMS/NEMS devices and applications II

Case study Presentation

Microfluiduic devices, and MEMS Microvalves for micropropulsion


Week 7

Smart polymers and microfluidics

Case study Presentation

Smart polymer, droplet-based microfluidics and interface science

Week 8

Term-project: mid-term presentation (and progress report due)

Week 9

Nanomaterials characterization

Case study Presentation

SEM and AFM characterization techniques

Week 10

Carbon nanotubes and nanoelectronics

Case study Presentation

Materials characteristics, and CNT nanoelectronics, FETs, SETs

Week 11

Graphene and 2D dichalcogenides

Case study Presentation

Exfoliation, Raman, CVD growth and applications

Week 12

Nanobio sensors

Case study Presentation

Definitions, mechanical, electrical, optical, and applications

Week 13


Week 14

Term-Project Poster Presentations (and final report due)