Applications of Advanced Micro/Nano Materials, Structures and Devices

School of Engineering and Science

Spring 2017


Meeting Time:            Friday 3:00pm – 5:30pm

Classroom Location:   C207 (F)

Instructor:                   Eui-Hyeok (EH) Yang           

Contact Info:               Carnegie 206,, 201-216-5574

Office Hours:              Friday 10am – 1:00pm

Course Web Address: None

Prerequisite(s):            ME573 or instructor permission

Corequisite(s):            None

Cross-listed with:        None



The goals of this course are to go beyond the introduction stage in Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) to provide students with a strong background in design and characterization of micro and nano scale sensors and actuators with a broad range of applications in CNT and graphene-based sensors, actuators and devices, biomedical systems, micro- and nanoscale manipulation, adaptive optics, and microfluidics. The main focus is to understand the fundamental challenges and limitations involved in designing and demonstrating micro and nano devices and systems.



After successful completion of this course, students will be able to

·         demonstrate knowledge of designing, fabricating and characterizing:

–        Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS)

–        Carbon Nannotubes and graphene-based devices

–        Microactuators and microfluidic devices

·         develop presentation and reporting skills

[SES Outcome 2 Engineering Foundations - the ability to use applied scientific knowledge (ABET Criterion 3-e)].



·         This course is comprised of weekly lectures with extensive hands-on course projects embedded in the lectures.



We will use a combination of selections from references books, MEMS journal publications and on-line information.



Attendance     All students start the semester 10 points for attendance. A student will lose 1 points for each additional absences. Excused absences (religious or medical, noted in via email to the professor prior to the absence occurring) accompanied by proper documentation will not lead to point deductions.

Case Study     Each student is expected to make a presentation on a selected topic by (a) identifying the relevant research literature representing the state of the art on a specific research subject, (b) structuring, summarizing and critiquing this body of literature, and (c) drawing conclusions from and evaluating the significance and impact of this body of literature.

Term Project Students will experience hands-on projects including the device design, mask design, process design (fabrication), or modeling, and characterization.

Quiz                Several quizzes will be given during the class.



·         There are 10 possible points that a student can earn in this course. The final grade will be based on the number of points earned out of the number of points possible. Percentages are also listed below.




Undergraduate Honor System

Enrollment into the undergraduate class of Stevens Institute of Technology signifies a student's commitment to the Honor System. Accordingly, the provisions of the Stevens Honor System apply to all undergraduate students in coursework and Honor Board proceedings. It is the responsibility of each student to become acquainted with and to uphold the ideals set forth in the Honor System Constitution. More information about the Honor System including the constitution, bylaws, investigative procedures, and the penalty matrix can be found online at


The following pledge shall be written in full and signed by every student on all submitted work (including, but not limited to, homework, projects, lab reports, code, quizzes and exams) that is assigned by the course instructor. No work shall be graded unless the pledge is written in full and signed.


“I pledge my honor that I have abided by the Stevens Honor System


Reporting Honor System Violations

Students who believe a violation of the Honor System has been committed should report it within ten business days of the suspected violation. Students have the option to remain anonymous and can report violations online at


Graduate Student Code of Academic Integrity

All Stevens graduate students promise to be fully truthful and avoid dishonesty, fraud, misrepresentation, and deceit of any type in relation to their academic work. A student’s submission of work for academic credit indicates that the work is the student's own. All outside assistance must be acknowledged. Any student who violates this code or who knowingly assists another student in violating this code shall be subject to discipline.

All graduate students are bound to the Graduate Student Code of Academic Integrity by enrollment in graduate coursework at Stevens. It is the responsibility of each graduate student to understand and adhere to the Graduate Student Code of Academic Integrity. More information including types of violations, the process for handling perceived violations, and types of sanctions can be found at


Special Provisions for Undergraduate Students in 500-level Courses

The general provisions of the Stevens Honor System do not apply fully to graduate courses, 500 level or otherwise. Any student who wishes to report an undergraduate for a violation in a 500-level course shall submit the report to the Honor Board following the protocol for undergraduate courses, and an investigation will be conducted following the same process for an appeal on false accusation described in Section 8.04 of the Bylaws of the Honor System. Any student who wishes to report a graduate student may submit the report to the Dean of Graduate Academics or to the Honor Board, who will refer the report to the Dean. The Honor Board Chairman will give the Dean of Graduate Academics weekly updates on the progress of any casework relating to 500-level courses. For more information about the scope, penalties, and procedures pertaining to undergraduate students in 500-level courses, see Section 9 of the Bylaws of the Honor System document, located on the Honor Board website.



The following procedures apply to quizzes and exams for this course. As the instructor, I reserve the right to modify any conditions set forth below by printing revised Exam Room Conditions on the quiz or exam.


1.      Students may use the following devices during quizzes and exams. Any electronic devices that are not mentioned in the list below are not permitted.








Cell Phones                






Smart Watches



Google Glass              



Other (Nonprogrammable calculator)












2.      Students may use the following materials during quizzes and exams. Any materials that are not mentioned in the list below are not permitted.





Handwritten Notes



Typed Notes; Conditions: one 8x10 sheet (Times 11 and black) is permitted.
















3.      Students are not allowed to work with or talk to other students during quizzes and/or exams.



Stevens Institute of Technology is dedicated to providing appropriate accommodations to students with documented disabilities. Student Counseling and Disability Services works with undergraduate and graduate students with learning disabilities, attention deficit-hyperactivity disorders, physical disabilities, sensory impairments, and psychiatric disorders in order to help students achieve their academic and personal potential. They facilitate equal access to the educational programs and opportunities offered at Stevens and coordinate reasonable accommodations for eligible students. These services are designed to encourage independence and self-advocacy with support from SCDS staff.  The SCDS staff will facilitate the provision of accommodations on a case-by-case basis. These academic accommodations are provided at no cost to the student.


Disability Services Confidentiality Policy

Student Disability Files are kept separate from academic files and are stored in a secure location within the office of Student Counseling, Psychological & Disability Services. The Family Educational Rights Privacy Act (FERPA, 20 U.S.C. 1232g; 34CFR, Part 99) regulates disclosure of disability documentation and records maintained by Stevens Disability Services. According to this act, prior written consent by the student is required before our Disability Services office may release disability documentation or records to anyone. An exception is made in unusual circumstances, such as the case of health and safety emergencies.


For more information about Disability Services and the process to receive accommodations, visit If you have any questions please contact:

Lauren Poleyeff, Psy.M., LCSW - Diability Services Coordinator and Staff Clinician in Student Counseling and Disability Services at Stevens Institute of Technology at or by phone (201) 216-8728.



Stevens Institute of Technology believes that diversity and inclusiveness are essential to excellence in education and innovation. Our community represents a rich variety of backgrounds, experiences, demographics and perspectives and Stevens is committed to fostering a learning environment where every individual is respected and engaged. To facilitate a dynamic and inclusive educational experience, we ask all members of the community to:

·         be open to the perspectives of others

·         appreciate the uniqueness their colleagues 

·         take advantage of the opportunity to learn from each other       

·         exchange experiences, values and beliefs

·         communicate in a respectful manner

·         be aware of individuals who are marginalized and involve them

·         keep confidential discussions private 



The following is a tentative course schedule. Any and all changes to this schedule will be communicated to you 1) in class and 2) via email.


Week Starting


Presentation and Term-projects



Intro to Advanced MEMS/NEMS

Case study assignment

Course introduction, case study and term-project/device design


Micro/nano fabrication I


Micro and nano patterning, advanced lithography


Micro/nano fabrication II


Surface and bulk micromachining, device examples


Term-project: concept presentation


MEMS devices and applications I

Case study Presentation

MEMS adaptive optics, deformable mirrors, piezoelectric films


MEMS devices and applications II

Case study Presentation

MEMS actuators, comb drive actuators for large-scale space apertures


MEMS devices and applications III

Case study Presentation

Piezoelectric stacks, microvalves for microspacecrafts


Droplet microfluidics


Microfluidics, droplet microfluidics, smart polymer and applications


Term-project: mid-term presentation


Nanoscale Characterization


Nanoscale characterization using AFM, Raman, SEM


Carbon nanotubes


Carbon nanotubes - synthesis, devices and energy storage applications




Graphene synthesis, devices and energy storage applications


2D materials


Synthesis, devices and energy storage applications of TMDs


Term-Project Poster Presentations, Case study paper due