ME 681: Applications of Advanced Micro/Nano Materials, Structures and Devices               

Catalog Description:  The goals of this course are to go beyond the introduction stage in Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) to provide students with a strong background in design and characterization of micro and nano scale sensors and actuators with a broad range of applications in CNT and graphene-based sensors, actuators and devices, biomedical systems, micro- and nanoscale manipulation, adaptive optics, and microfluidics. The main focus is to understand the fundamental challenges and limitations involved in designing and demonstrating micro and nano devices and systems.


Prerequisites:  ME 573, ME 581 or equivalent

Cross-listing: NANO

Percentages for:  Case Study (30%), Quiz (20%), Project (Presentation (30%), Report (20%))


Credits: 3 credits       

Course’s Objectives: 

1. Students will be able to demonstrate knowledge of designing, fabricating and characterizing:

–        Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS)

–        Carbon Nannotubes and graphene-based devices

–        Microactuators

–        Microfluidic devices

2. Students will be able to develop presentation and reporting skills

Textbook(s) or References: 


We will use a combination of selections from MEMS/NEMS journal and conference publications and on-line information.


References Books:

M. Madou, Fundamentals of Microfabrication, CRC Press, 1997

Stephen D. Senturia, Microsystem Design, Kluwer Academic Publishers

G. Kovacs, Micromachined Transducers, McGraw-Hill, 1998

L. Ristic, Sensor Technology and Devices, Artech House, 1994

S. M. Sze, Semiconductor Sensors, John Wiley and Sons, 1994


J. Microelectromechanical Systems (IEEE/ASME)

Sensors and Actuators (Elsevier)

J. Micromechanics and Microengineering (IOP)

Nanotechnology (IOP)

Nanoletter (ACS)

Conference Proceedings:

Transducers (International Conference on Solid-State Sensors and Actuators), odd-numbered years since 1983, proceedings available from IEEE (US Meetings)

MEMS (IEEE Workshop on Micro Electro Mechanical Systems), annual since 1989.

Solid-State Sensors and Actuators Workshop, Hilton Head, SC, even-numbered years since 1984, proceedings available from Transducer Research Foundation.


Mode of Delivery       Class           

Program/Department Ownership: Mechanical Engineering




Homework, Presentation and Term-projects


Week 1

Intro to Advanced MEMS/NEMS

Case study assignment

Course introduction, case study and term-project/device design

Week 2

Micro/nano fabrication I


Micro and nano patterning, advanced lithography

Week 3

Micro/nano fabrication II


Surface and bulk micromachining, device examples

Week 4

Term-project: concept presentation

Week 5

MEMS devices and applications I

Case study Presentation

MEMS adaptive optics, deformable mirrors, piezoelectric films

Week 6

MEMS devices and applications II

Case study Presentation

MEMS actuators, comb drive actuators for large-scale space apertures

Week 7

MEMS devices and applications III

Case study Presentation

Piezoelectric stacks, microvalves for microspacecrafts

Week 8

Term-project: mid-term presentation

Week 9

Droplet microfluidics


Microfluidics, droplet microfluidics, smart polymer and applications

Week 10

Nanoelectronics and Nanomaterials


Nanoelectronics, CNT characteristics, fabrication, devices, Si-SETs and CNT-SETs, Nanomaterials

Week 11

Nanophotonics and Nanomechanics


Nanophotonics, nanoscale heat transfer, and nanomechanics

Week 12

Nanoscale Characterization


Nanoscale characterization using AFM, Raman, SEM

Week 13

Carbon nanotubes, Graphene and 2D materials


Carbon nanotubes and Graphene synthesis, devices and energy storage applications, and 2D layers

Week 14

Term-Project Poster Presentations, Case study paper due, Project report due



Department Point of Contact: Prof. Eui-Hyeok Yang