ME 581: Introduction to BioMEMS

Catalog Description: Bringing together the creative talents of electrical, mechanical, optical, and chemical engineers, materials specialists, clinical-laboratory scientists, and physicians, the science of biomedical microelectromechanical systems (Bio MEMS) promises to deliver sensitive, selective, fast, low cost, less invasive, and more robust methods for diagnostics, individualized treatment, and novel drug delivery. The goals of this course are to introduce microfabrication, microfluidics, sensors, actuators, drug delivery systems, micro total analysis systems and lab-on-a-chip devices, and detection and measurement systems. The main focus is to understand the fundamental challenges and limitations involved in designing and demonstrating BioMEMS devices.

Prerequisites: Senior or graduate level

Cross-listing: NANO

Percentages for: HW/Quiz 10%, Class work 20%, Midterm 20%, Projects 20%, Final 30%

Course’s Objective: Students will be able to design and analyze a) microfluidics, sensors, actuators, drug delivery systems, b) micro total analysis systems and lab-on-a-chip devices, and c) detection and measurement systems.

Textbook(s) or References:

Textbook: Fundamentals of BioMEMS and Medical Microdevices by Steven S. Saliterman (ISBN 081945977-1)

References Books:

M. Madou, Fundamentals of Microfabrication, CRC Press, 1997

G. Kovacs, Micromachined Transducers, McGraw-Hill, 1998

R. S. Muller, et al., Editors, Microsensors, IEEE Press, 1991

W. Trimmer, Editor, Micromechanics and MEMS, IEEE Press, 1997

Syllabus:

	Topic(s)	Description
Week 1	Intro to Bio MEMS	§ Course Introduction § BioMEMS definition
Week 2	Silicon Microfabrication	§ Lithography § Etching § Thin-Film Deposition (CVD and PVD) § Ion Implantation § Wet Bulk Surface Micromachining § Dry Bulk Surface Micromachining § Electroplating § Substrate Bonding
Week 3	Soft Fabrication and Polymers	§ Polymers, environmentally sensitive hydrogels and biological materials, § Soft-lithography, § Micromolding, § Microstereolithography, § Thick-film deposition, § Self-assembled monolayers (SAMs), § Other surface modifications.
Week 4	Microfluidic Principles	§ Science of fluid behavior in microchannels.
Week 5	Microfluidic devices	§ Microchannels, § Microfilters, § Microvalves, § Micropumps, § Microneedles, § Microreserviors, § Micro-reaction chambers.
Week 6	Sensor Principles and Microsensors	§ Defnition § Internal and external § Need to prevent biofouling. § Dynamic characteristics. § Other characteristics.
Week 7	Mid Term Exam	§ Review § Exam
Week 8	Microactuators & Drug Delivery / Detection and Measurement	§ Functions: Traditional MEMS, BioMEMS. § Electrochemical detection: § Labeled systems: § Non-Labeled systems:
Week 9	Micro Total Analysis Sytems	§ Increased efficiency through smaller scales. § Improved throughput of samples: § Advantages of surface modification. § Techniques for surface modification
Week 10	Microarrays	§ Cell, Protein, DNA, Immune system basics § Polymerase chain reaction (PCR), § Automatic DNA sequencing. § Bioinformatics § Functional Genomics
Week 11	Emerging BioMEMS / Tissue Engineering	§ An alternative approach to traditional surgery. § Specific targeting of tumors and other organs for drug delivery. § Micro-visualization and manipulation. § Implantation of microsensors, microactuators and other components of a larger implanted device or external system.
Week 12	MEMS Technology Examples I	MEMS technology presentation I
Week 13	MEMS Technology Examples II	MEMS technology presentation II
Week 14	Student Presentation Sessions	Term-Project Poster and Oral Presentations
Week 15	Final Exam

Prof. E. H. Yang, Stevens Institute of Technology , 스티븐스 공대, 양의혁 교수

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