Course Title: Introduction to Nanofabrication and Characterization (3-0-3)                

Course #: NANO 325

ABET Categories: Basic Science 50%, Engineering Science 50%


Catalog Description: 

The course addresses the science underpinnings of nanotechnology to provide a hands-on experience for undergraduate students in nanofabrication and characterization. It will discuss the grand challenges of nanofabrication and will showcase examples of specific applications in electronics, photonics, chemistry, biology, medicine, defense, and energy. NANO 200 would be a pre-requisite for this course. This course will offer hands-on experiments to fabricate prototype devices/systems (e.g. relatively simple sensors or actuators) in order for students to understand the full sequence/spectrum of development of nanodevices and systems, e.g. from concept design, fabrication and characterization.

Prerequisites:  NANO 200 or instructor permission

Percentages for:  Attendance 10%; Homework 10%; Quiz 20%; Course Project: Proposal Presentation= 10%, Progress Report = 20%, Final Poster Presentation = 30%

Course’s Objective:  Students will be able to understand the fundamental challenges and limitations involved in designing, fabricating and characterizing nanomaterials and nanodevices.

Course Outcomes:

·      Demonstrates a knowledge of scientific issues that distinguish nanoscale phenomena from those at the macroscopic scale - [SES Outcome 1 Scientific Foundations - an understanding of the scientific and mathematical basis of engineering (ABET Criterion 3-a)]

·      Demonstrates a knowledge of fabricating and characterizing nanoengineered structures of technological value - [SES Outcome 2 Engineering Foundations - the ability to use applied scientific knowledge (ABET Criterion 3-e)]

·      Can fabricate and characterize simple nanoengineered structures - [SES Outcome 3 Engineering Foundations - the ability to design experiments, conduct experiments, and analyze experimental data & SES Outcome 6 Tools – the ability to use the relevant tools (ABET Criterion 3-b,3-k)]

·      Can describe potential impacts of nanotechnology on future technologies related to medicine, defense, and energy, and other important sectors [SES Outcome 12 Social Issues - an understanding of contemporary social issues including the interaction of technology with society (ABET Criterion 3-h, 3-j)]

Textbook(s) or References: 


Main Text:

•          M. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume II, CRC Press, 2011, 0849331803



•          Ben Rogers, Sumita Pennathur and Jesse Adams, Nanotechnology – Understanding Small Systems, 2nd Edition, CRC Press, Tylor & Francis Group, ISBN-10: 143984920X

Mode of Delivery                Class                




Week 1:

Introduction to Miniaturization

§  Course introduction

§  Introduction to Nanoscale Devices and Systems

§  Project overview

Week 2:


§  Optical lithography

§  (Lab) Optical lithography (MA-6 at MDL)

Week 3:


§  Nanoimprint nanolithography

§  (Lab) Nanoimprinting (Nanonex at MDL)

Week 4:


§  Interference nanolithography

§  (Lab) Interference lithography (Choi Lab)

Week 5:

Imaging for Nanopatterns

§  SEM and E-beam nanolithography

§  (Lab) SEM (demo at MDL)

Week 6:

Project proposal

§  Project proposal presentation (students)

Week 7:

Deep Reactive Ion Etching for Nanopatterns

§  DRIE (or ICP)

§  (Lab) DRIE (or ICP) (demo at MDL)

Week 8:


§  Graphene

§  (Lab) Graphene exfoliation and Raman characterization (Yang Lab)

Week 9:

Nanoscale characterization

§  Nanomaterial characterization

§  (Lab) AFM (Yang Lab)

Week 10:


§  Nanophotonics

§  (Lab) Demo (Strauf Lab)

Week 11:


Student Project Report

§  Nanoelectronics


§  Student Projects: Progress Report due & short presentation

Week 12:

Microscale Fluidics

§  Smart Polymer and droplet microfluidics

§  (Lab) Demonstration on PPy synthesis and droplet manipulation (Yang Lab)


Week 13:


§  Quiz


Week 14:

Poster presentation

§  Student Project: Final Poster presentation