Introduction to Nanotechnology – NANO 325

School of Engineering and Science


Meeting Times:           Tuesday 2:00 am – 2:50am, Friday 3:00pm – 4:40pm

Classroom Location:   Carnegie 316

Instructor:                   Eui-Hyeok (EH) Yang           

Contact Info:              Carnegie 206,, 201-216-5574

Office Hours:              Tuesday and Friday 10:00am – 12:00pm

Course Web Address: None

Prerequisite(s):            NANO 200 or instructor permission

Corequisite(s):             None

Cross-listed with:        None



The course addresses the science underpinnings of nanotechnology to provide a hands-on experience for undergraduate students in nanofabrication and characterization. It will discuss the grand challenges of nanofabrication and will showcase examples of specific applications in electronics, photonics, chemistry, and biology. This course will offer hands-on experiments for students to understand the overall spectrum of fabrication and characterization of nanomaterials and nanostructures, e.g. from concept design, fabrication and characterization.


Students will be able to understand the fundamental challenges and limitations involved in designing, fabricating and characterizing nanomaterials and nanodevices.

After successful completion of this course, students will be able to

·      Demonstrates a knowledge of scientific issues that distinguish nanoscale phenomena from those at the macroscopic scale - [SES Outcome 1 Scientific Foundations - an understanding of the scientific and mathematical basis of engineering (ABET Criterion 3-a)]

·      Demonstrates a knowledge of fabricating and characterizing nanoengineered structures of technological value - [SES Outcome 2 Engineering Foundations - the ability to use applied scientific knowledge (ABET Criterion 3-e)]

·      Can fabricate and characterize simple nanoengineered structures - [SES Outcome 3 Engineering Foundations - the ability to design experiments, conduct experiments, and analyze experimental data & SES Outcome 6 Tools – the ability to use the relevant tools (ABET Criterion 3-b,3-k)]

·      Can describe potential impacts of nanotechnology on future technologies related to medicine, defense, and energy, and other important sectors [SES Outcome 12 Social Issues - an understanding of contemporary social issues including the interaction of technology with society (ABET Criterion 3-h, 3-j)]


·         This course is comprised of bi-weekly lectures with course projects and extensive equipment demonstrations embedded in the lectures.



Textbook(s): Nanotechnology – Understanding Small Systems, 2nd Edition by Ben Rogers, Sumita Pennathur and Jesse Adams CRC Press, Tylor & Francis Group

Other Readings:       

1. Introduction to BioMEMS by Albert Folch (ISBN 978-1-4398-1839-8), CRC Press, 2013

2. Available online through Canvas course shell



Quiz               There will be 1 scheduled quiz throughout the semester. Quizzes will be graded for accuracy and returned within 2 class periods. If a student is absent (unexcused) on a day that a quiz is given s/he will receive an automatic 0 for that quiz.

Attendance     All students start the semester 20 points for attendance. A student will lose 1 points for each additional absences. Excused absences (religious or medical, noted in via email to the professor prior to the absence occurring) accompanied by proper documentation will not lead to point deductions.

Term Project Students will experience hands-on projects including the device design, process design (fabrication), or modeling, and characterization. The term project consists of Proposal Presentation= 10%, Progress Report = 20%, Final Poster Presentation = 30%




·         There are 100 possible points that a student can earn in this course. The final grade will be based on the number of points earned out of the number of points possible. Percentages are also listed below.


·         Quiz (30%)                                    30 points possible

·         Attendance/Attitude (10%)          10 points possible

·         Project (60%)                                60 points possible

o   Result (20%)

o   Presentation (20%)

o   Report (20%)

·         TOTAL 100%                               100 points possible



Undergraduate Honor System

Enrollment into the undergraduate class of Stevens Institute of Technology signifies a student's commitment to the Honor System. Accordingly, the provisions of the Stevens Honor System apply to all undergraduate students in coursework and Honor Board proceedings. It is the responsibility of each student to become acquainted with and to uphold the ideals set forth in the Honor System Constitution. More information about the Honor System including the constitution, bylaws, investigative procedures, and the penalty matrix can be found online at


The following pledge shall be written in full and signed by every student on all submitted work (including, but not limited to, homework, projects, lab reports, code, quizzes and exams) that is assigned by the course instructor. No work shall be graded unless the pledge is written in full and signed.


“I pledge my honor that I have abided by the Stevens Honor System


Reporting Honor System Violations

Students who believe a violation of the Honor System has been committed should report it within ten business days of the suspected violation. Students have the option to remain anonymous and can report violations online at


Graduate Student Code of Academic Integrity

All Stevens graduate students promise to be fully truthful and avoid dishonesty, fraud, misrepresentation, and deceit of any type in relation to their academic work. A student’s submission of work for academic credit indicates that the work is the student's own. All outside assistance must be acknowledged. Any student who violates this code or who knowingly assists another student in violating this code shall be subject to discipline.

All graduate students are bound to the Graduate Student Code of Academic Integrity by enrollment in graduate coursework at Stevens. It is the responsibility of each graduate student to understand and adhere to the Graduate Student Code of Academic Integrity. More information including types of violations, the process for handling perceived violations, and types of sanctions can be found at


Special Provisions for Undergraduate Students in 500-level Courses

The general provisions of the Stevens Honor System do not apply fully to graduate courses, 500 level or otherwise. Any student who wishes to report an undergraduate for a violation in a 500-level course shall submit the report to the Honor Board following the protocol for undergraduate courses, and an investigation will be conducted following the same process for an appeal on false accusation described in Section 8.04 of the Bylaws of the Honor System. Any student who wishes to report a graduate student may submit the report to the Dean of Graduate Academics or to the Honor Board, who will refer the report to the Dean. The Honor Board Chairman will give the Dean of Graduate Academics weekly updates on the progress of any casework relating to 500-level courses. For more information about the scope, penalties, and procedures pertaining to undergraduate students in 500-level courses, see Section 9 of the Bylaws of the Honor System document, located on the Honor Board website.



The following procedures apply to quizzes and exams for this course. As the instructor, I reserve the right to modify any conditions set forth below by printing revised Exam Room Conditions on the quiz or exam.


1.      Students may use the following devices during quizzes and exams. Any electronic devices that are not mentioned in the list below are not permitted.








Cell Phones                          






Smart Watches



Google Glass                        



Other (Nonprogrammable calculator)








2.      Students may use the following materials during quizzes and exams. Any materials that are not mentioned in the list below are not permitted.






Handwritten Notes



Typed Notes

Conditions: one 8x10 sheet (Times 11 and black) is permitted.


















3.      Students are not allowed to work with or talk to other students during quizzes and/or exams.



Stevens Institute of Technology is dedicated to providing appropriate accommodations to students with documented disabilities. Student Counseling and Disability Services works with undergraduate and graduate students with learning disabilities, attention deficit-hyperactivity disorders, physical disabilities, sensory impairments, and psychiatric disorders in order to help students achieve their academic and personal potential. They facilitate equal access to the educational programs and opportunities offered at Stevens and coordinate reasonable accommodations for eligible students. These services are designed to encourage independence and self-advocacy with support from SCDS staff.  The SCDS staff will facilitate the provision of accommodations on a case-by-case basis. These academic accommodations are provided at no cost to the student.


Disability Services Confidentiality Policy

Student Disability Files are kept separate from academic files and are stored in a secure location within the office of Student Counseling, Psychological & Disability Services. The Family Educational Rights Privacy Act (FERPA, 20 U.S.C. 1232g; 34CFR, Part 99) regulates disclosure of disability documentation and records maintained by Stevens Disability Services. According to this act, prior written consent by the student is required before our Disability Services office may release disability documentation or records to anyone. An exception is made in unusual circumstances, such as the case of health and safety emergencies.


For more information about Disability Services and the process to receive accommodations, visit If you have any questions please contact:

Lauren Poleyeff, Psy.M., LCSW - Diability Services Coordinator and Staff Clinician in Student Counseling and Disability Services at Stevens Institute of Technology at or by phone (201) 216-8728.



Stevens Institute of Technology believes that diversity and inclusiveness are essential to excellence in education and innovation. Our community represents a rich variety of backgrounds, experiences, demographics and perspectives and Stevens is committed to fostering a learning environment where every individual is respected and engaged. To facilitate a dynamic and inclusive educational experience, we ask all members of the community to:

·         be open to the perspectives of others

·         appreciate the uniqueness their colleagues 

·         take advantage of the opportunity to learn from each other       

·         exchange experiences, values and beliefs

·         communicate in a respectful manner

·         be aware of individuals who are marginalized and involve them

·         keep confidential discussions private 



The following is a tentative course schedule. Any and all changes to this schedule will be communicated to you 1) in class and 2) via email.


Week Starting




§  Course introduction

§  Introduction to Nanoscale Devices and Systems

§  Project overview



§  Optical lithography basics

§  Demonstration on optical lithography


Project proposal presentation


§  SEM and E-beam nanolithography

§  Demonstration on SEM


§  Nanoimprint nanolithography

§  Demonstration on Nanoimprinting


§  Interference nanolithography


§  Demonstration on Interference lithography


§  Deep Reactive Ion Etching (DRIE)

§  Demonstration on DRIE 


§  Graphene, Carbon nanotubes, TMDs I

§  Demonstration on graphene exfoliation and Raman spectroscopy


§  Graphene, Carbon nanotubes, TMDs  II

§  Demonstration on CVD growth of graphene and CNTs


§  Graphene, Carbon nanotubes, TMDs  III

§  Demonstration on transfer of graphene


§  Atomic force microscopy


§  Demonstration on AFM


§  Conjugated polymers, microscale droplet manipulation

§  Demonstration on droplet manipulation




Poster presentation, Project report due