Micro Device Laboratory (MDL): Stevens Institute of Technology is currently implementing an Institute-wide vision of a leading research and teaching thrust in the area of micro/nanotechnology, and has internally committed considerable resources to realize this vision. The multi-user Micro Device Laboratory (MDL) is equipped with an atomic force microscope (Pacific Nanotechnology AFM), a mask aligner (Karl Suss MA6), a spin coater, a spin rinse drier, a solvent bench, a wet etch bench, two laminar hoods, hotplate systems, a furnace, ovens, a thermal evaporator, and surface treatment equipments. In addition, a deep reactive ion etcher (BMR DRIE), a Xenon Difluoride etcher (Xactix XeF2) and an ICP etcher are also equipped along with other testing equipments such as a microscope, a probe station and a scanning electron microscope (FEI XL-40 SEM) with a 3-D nanomanipulator (Zyvex).

Nano/Micro Structures and Devices Engineering Lab is equipped with a pulsed laser deposition system, a Galvanostat/Potentiostat (PAR Model 263A) with an electroplating station, a HiRox Hi-resolution Digital Microscope, a chemical vapor deposition system, wet benches with a fume hood and testing equipments such as a spectrum analyzer, a signal generator, a precision power supply, and other lab equipments for nanomaterial purification.

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Prof. E. H. Yang, Ph.D, Stevens Institute of Technology

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