Lab

Members

Research

Publication

Positions

 

 

PEER REVIEWED PAPERS

 

2010

Journal

1.        O.Sul, S. Jang and E. H. Yang, “Measurement of Young’s Modulus of Polypyrrole Nanowires by Lateral Force Microscopy,” in prep

2.        O.Sul, S. Jang, D. S. Choi and E. H. Yang, “Fabrication and Characterization of a Ni-Al2O3 Bimorph Nanoactuator”, in prep

3.        J. R. Park, D. S. Choi, D. H. Gracias, N. Presser, G. W. Stupian, M. S. Leung, T. G. Leong, J. H. Kim, E. H. Yang, and Y. K. Kim, “RF Nanoantenna Fabricated on a Nanoliter-Scale 3D Microcontainer by Focused Ion Beam Ion-Induced Metals Deposition,” in prep

4.        K. Kumar, O. Sul, S. Strauf, F. Fisher, D. S. Choi, M. G. Prasad, and E. H. Yang, “A Study on Nanoscale Carbon Nanotube Local Oxidation Lithography using an Atomic Force Microscope,” in prep

5.        O.Sul, S. Jang and E. H. Yang, “Determination of Mechanical Properties and Thermal Actuation Behaviors of Polypyrrole-Copper Bimorph Nanoactuators,” IEEE Nanotechnology; in review

6.        N. Gao, H. Wang and E. H Yang, “An Experimental Study on Ferromagnetic Nickel Nanowires Functionalized with Antibody for Cell Separation,” Nanotechnology, in press

7.        D. S. Choi, V. Fucsko, E. H. Yang., J.-R. Park, F. Khalid and Y.-K. Kim, “Vertical Arrays of Copper Nanotube Grown on Silicon Substrate by CMOS Compatible Electrochemical Process for IC Packaging Applications’, Journal of Microelectronics and Electronic Packaging, in press

8.        D. S. Choi, J.-R. Park, S. Lee, T. Hahn, N. Presser, M. Leung, G. Stupian, E. H. Yang, and F Khalid, “On-chip Microcapacitors based on Electrochemically Grown Vertical Arrays of Gold Nanowire as Electrodes ,” Thin Solid Films; in press

Conference Proceedings

1.        E. H Yang, “Engineered Nanowires, Carbon Nanotubes and Graphene for Sensors, Actuators and Electronics,” Invited Paper, SPIE MEMS-MOEMS, San Fransisco, Jan. 2010.

 

2009

Journal

1.        D. S. Choi and E. H. Yang, “Fabrication of Buried Nanochannels by Transferring Metal Nanowire Patterns,” Sensors and Materials, vol. 21, no. 6, pp. 315-319, 2009

2.        O.Sul, S. Jang and E. H. Yang, “Step-Edge Calibration of Torsional Sensitivity for Lateral Force Microscopy,” Measurement Science and Technology, 20 (2009) 115104. (doi:10.1088/0957-0233/20/11/115104)

3.        R. Toda, Z. Chang, X. Jiang, K. Shcheglov and E. H. Yang, “Hybrid Linear Microactuators and Their Control Models for Mirror Shape Correction,” Journal of Micro and Nano-Mechatronics, (DOI 10.1007/s12213-009-0017-2) 2009

4.        S. W. Lee, S. S. Lee and E. H. Yang, “A Study on Field Emission Characteristics of Planar Graphene Sheets,“ Nanoscale Research Letters (DOI 10.1007/s11671-009-9384-9) 2009

5.        O.Sul and E. H. Yang, “A Multi-Walled Carbon Nanotube-Aluminum Bimorph Nanoactuator,” Nanotechnology, vol. 20, 095502, 2009.

Conference Proceedings

1.        R. Leeladhar, W. Xu, Y-T. Tsai, E. H. Yang, and C-H. Choi, “Nanofluid Droplet Evaporation on Superhydrophobic Surfaces,” m-TAS, Cheju, Korea,  Nov 2009.

2.        O. Sul, C. Tsai, N. Gao, and E. H Yang, “Preprogrammed Self-Arrangement of Multiple Individual Nano-Objects on a Substrate,” m-TAS, Cheju, Korea, Nov 2009.

3.        P. A. Huang and E. H Yang, “MEMS Thruster System for CubeSat Orbital Maneuver Applications,” ASME International Mechanical Engineering Congress and Exposition, Lake Buena Vista, FL, Nov 2009.

4.        E. H. Yang, S. Strauf, F. Fisher, and D. S. Choi, “Carbon-based Nano Devices for Sensors, Actuators and Electronics,” Invited Paper, SPIE Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference 7318 - Proceedings of SPIE Volume 7318, Orlando, FL, April 2009.

5.        N. Ai, Y. T. Tsai, Q. Song, E. H Yang, D. S. Choi and S. Strauf, “Electro-optical Characterization of Individual Multiwall Carbon Nanotubes,” SPIE Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference 7318 - Proceedings of SPIE Volume 7318, Orlando, FL, April 2009.

6.        S. Jang, S. Manoochehri and E. H. Yang, “Fabrication of Vertically Standing Metal Nanowire Arrays on Silicon and Glass Substrates using Polycarbonate Membrane,”  Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference 7318 - Proceedings of SPIE Volume 7318, Orlando, FL, April 2008.

7.        N. Gao, X. Yang, Y. T. Tsai, G. Meh Chu, H. Wang and E. H Yang, “Antibody-Functionalized Magnetic Nanowires for Cell Purification,” SPIE Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference 7318 - Proceedings of SPIE Volume 7318, Orlando, FL, April 2009.

 

2008

1.        Y. Rheem, C. Hangarter, E. H. Yang, N. V. Myung, and B. Yoo, “Site-Specific Magnetic Assembly of Ferromagnetic Nanowire,” IEEE Transactions on Nanotechnology, Vol. 7, pp. 251-255, 2008.

2.        O. Sul and E. H. Yang, "Development of Carbon Nanotube-Based Nanoactuator for Nano-Conveyer System", ASME International Mechanical Engineering Congress and Exposition, Boston, MA, Nov 2008

3.        Y. T. Tsai, W. Xu, E. H. Yang and C.H. Choi, “Interfacial-Tension-Directed Self-Assembly of Nanowires on a Superhydrophobic Surfaces, ASME International Mechanical Engineering Congress and Exposition, Boston, MA, Nov. 2008.

4.        H. J. Yoon, J. H. Yang, S. S. Yang, and E. H. Yang, “Microfabricated Nanowire Sorter for Nanowire Assembly”, ASME International Mechanical Engineering Congress and Exposition, Boston, MA, Nov. 2008.

5.        D. S. Choi, V. Fucsko and E. H. Yang, “Copper Nanotubes for Packaging Applications,” IEEE Aerospace Conference, Big Sky, Montana, USA, April 2008. 

6.        H. Yu, Y. Tsai, H. Wang and E. H. Yang, “Internationalization of Gold and Nickel Nanowires by Living Cells,” SPIE Defense and Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE, Orlando, FL, March 2008.

 

2007

1.        R. Toda and E. H. Yang, “Normally-Latched, Large-Stroke, Inchworm Microactuator,” Journal of Micromechanics and Microengineering, Vol. 17, pp. 1715-1720, 2007.

2.        E. H. Yang, C. Lee and J. Khodadadi, Invited Paper “Development of MEMS-Based Piezoelectric Microvalve Technologies – Fabrication, Characterization and Modeling,” Sensors and Materials, Special Issue on Microvalve, Vol. 19, pp.1-18, 2007.

3.        C. M. Hangarter, Y. Rheem, B. Yoo, E. H. Yang, and N. V. Myung, Cover Issue, Most downloaded paper, “Hierarchical Magnetic Assembly of Nanowires,” Nanotechnology, Vol. 18, Issue 20, pp. 205-305, 2007.  

4.        E. H. Yang, Ji Su, T.-B. Xu, R. Morgan, and Z. Chang, "Active Membrane Using Electrostrictive Graft Elastomer for Deployable and Lightweight Mirrors ", ASME International Mechanical Engineering Congress and Exposition, Seattle, Washington, Nov 2007

5.        E. H. Yang, "Microactuators for Wavefront Correction in Space,” Invited Paper, SPIE Defense and Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE, Vol. 6556, Orlando, FL, April 2007.

2006

1.        C. A. Johnson, J. M. Khodadadi and E. H. Yang, “Modeling of Frictional Gas Flow Effects in a Piezoelectrically Actuated High-pressure Microvalve under Low Leak-rate Conditions,” Journal of Micromechanics and Microengineering, vol. 16, pp. 2771-2782, 2006.

2.        E. H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-McKinstry, E. Bloemhof, and B. M. Levine, “Thin-Film Piezoelectric Unimorph Actuator-based Deformable Mirror with a Transferred Silicon Membrane,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 15, No. 5, pp. 1214-1225, Oct. 2006.  

3.        C. Lee, E. H. Yang, S. M. Saeidi and J. Khodadadi, “Fabrication, Characterization and Computational Modeling of a Piezoelectrically Actuated Microvalve for Liquid Flow Control,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 15, No.3, pp.686-696, June 2006. 

4.        Y. Hishinuma and E. H. Yang, "Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous Membrane Deformable Mirror," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 15, No. 2, pp. 370-379, April 2006. 

5.        B. Yoo, Y. Rheem, C. Hangarter, E. H. Yang, and N. V. Myung, “Site-Specific Magnetic Assembly of Nanostructures for Sensor Arrays,” Proceedings of 2006 IEEE Sensors Conference, Daegu, Korea, October, 2006.

6.        R. Toda and E. H. Yang, “Zero-Power Latching, Large-stroke, High-precision Linear Microactuator for Lightweight Structures in Space,” IEEE Micro Electro Mechanical Systems (MEMS) Conference, Istanbul, Turkey, January 2006.

 

2005

1.        R. Toda and E. H. Yang, “Development of Latching Type Large Vertical Travel Microactuator,” ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK ’05), San Francisco, USA, July 17-22, 2005.

2.        Y. Hishinuma and E. H. Yang, “Large Aperture Deformable Mirror with a Transferred Single-Crystal Silicon Membrane Actuated Using Large-Stroke PZT Unimorph Actuators,” IEEE Int. Conf. Solid-State Sensors and Actuators (Transducers '05), Seoul, Korea, June 2005.

3.        S. M. Saeidi, J.M. Khodadadi, C.A. Johnson, C. Lee and E. H. Yang, “Computational Modeling of a Piezoelectrically Actuated Microvalve for the Control of Liquid Flowrate”, 2005 NSTI Nanotechnology Conference and Trade Show, Nanotech 2005, May 8-12, 2005, Anaheim, California, U.S.A.

4.       R. Toda and E. H. Yang, “Fabrication and Characterization of Vertical Travel Linear Microactuator,” SPIE Photonics West, MOEMS-MEMS Conference, San Jose, California, USA, January 2005. 

5.       Y. Hishinuma, E. H. Yang, Eric Bloemhof, and B. Martin Levine, “Piezoelectric Unimorph MEMS Deformable Mirror for Ultra-Large Telescopes,” SPIE Photonics West, MOEMS-MEMS Conference, San Jose, California, USA, January 2005. 

2004

1.       E. H. Yang, C. S. Lee, J. Mueller and T. George, "Leak-Tight Piezoelectric Microvalve for High-Pressure Gas Micropropulsion," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 13, No. 5, pp. 799-807, Oct. 2004. 

2.        R. Toda and E. H. Yang, “Fabrication and Characterization of Vertical Inchworm Microactuator,” Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California, November 13-19, 2004.

3.        Y. Hishinuma, E. H. Yang, J. –G. Cheng, and Susan Trolier-McKinstry, “Optimized Design, Fabrication and Characterization of PZT Unimorph Microactuators for Large-Stroke, Continuous Membrane Deformable Mirrors,” Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California, November 13-19, 2004.

4.       Y. Hishinuma and E. H. Yang, “Single-Crystal Silicon Continuous Membrane Deformable Mirror with PZT Unimorph Microactuator Arrays,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 6-10, 2004. 

5.        C. Lee and E. H. Yang, “Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 6-10, 2004. 

 

2003

1.        E. H. Yang and D. V. Wiberg, "A Wafer-Scale Membrane Transfer Process for the Fabrication of Optical Quality, Large Continuous Membranes," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 12, No. 6, pp. 804-815, Dec. 2003. 

2.        C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technology without Nanolithography,” NanoLetters, Vol. 3, No. 10, pp. 1339-1340, Oct. 2003. 

3.        J. Mueller, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, S. Vargo, and R. Reinicke, Invited Paper “An Overview of MEMS-Based Micropropulsion Developments at JPL,” Acta Astronautica, Vol. 52, No. 9~12, pp. 881-895, 2003. (conference version)

4.        C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technology without Nanolithography,” Micro-TAS Conference, Lake Tahoe, CA, USA, Oct. 5-9, 2003.

5.        C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technique Using Chemical-Mechanical Polishing (CMP) and Thermal Oxidation,” IEEE-Nano 2003, San Francisco, CA, USA, August 12-14, 2003.

6.        S. N. Gullapalli, E. H. Yang and S. –S. Lih, “New Technologies for the Actuation and Control of Large Aperture Lightweight Optical Quality Mirrors,” IEEE Aerospace Conference, Big Sky, Montana, USA, 2003. 

7.        D. S. Choi and E. H. Yang, “Fabrication of 20 nm Embedded Longitudinal Nanochannels by Etching Sacrificial Nanowires,” Nanotechnology Conference and Trade Show, San Francisco, California, USA, February 23-27, 2003.

8.        E. H. Yang, C. Lee and J. Mueller, “Normally-Closed, Leak-Tight Piezoelectric Microvalve with Ultra-High Pressure Upstream Flow Control for Integrated Micropropulsion,” IEEE International Conference on Microelectromechanical Systems (MEMS ’03) Conference, Kyoto, Japan, Jan. 2003, pp. 80-83.

9.        P. Krulevitch, P. Bierden, T. Bifano, E. Carr, C. Dimas, H. Dyson, M. Helmbrecht, P. Kurczynski, R. Muller, S. Olivier, Y. Peter, B. Sadoulet, O. Solgaard, and E. H. Yang, “MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics,” Invited Paper, SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003.

10.     E. H. Yang, R. Dekany and S. Padin, “Design and Fabrication of a Large Vertical Travel Silicon Inchworm Microactuator for Advanced Segmented Silicon Space Telescope (ASSiST),” SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003. 

11.     E. H. Yang, K. Shcheglov and Susan Trolier-McKinstry, “Concept, Modeling and Fabrication Techniques for Large-Stroke Piezoelectric Unimorph Deformable Mirrors,” SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003. 

 

2002

1.        E. H. Yang and C. Lee, "Piezoelectric Microvalves for Micropropulsion," ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, November 2002.

2.        E. H. Yang, N. Rohatgi and L. Wild, "A Piezoelectric Microvalve for Micropropulsion," AIAA Conference on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas, 9 - 12 Sep. 2002.

3.        J. Mueller, C. Marrese, J. Ziemer, A. Green,  M. Mojarradi, T. Johnson, E. H. Yang, V. White, D. Bame, R. Wirz, M. Tajmar, J. Schein, R. Reinicke, and V. Hruby "JPL Micro-Thrust Propulsion Activities," AIAA Conference on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas, 9 - 12 Sep. 2002.

4.        E. H. Yang, and K. Shcheglov, "A Piezoelectric Bimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes," SPIE International symposium on Astronomical Telescopes and Instrumentation, Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA, 22-28 August 2002.

5.        R. Dekany, D. McMartin, S. Padin, E. H. Yang and M. Troy, "Advanced Segmented Silicon Space Telescopes (ASSiST)," SPIE International symposium on Astronomical Telescopes and Instrumentation, Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA, 22-28 August 2002.

 

2001

1.        E. H. Yang and D. V. Wiberg, "A Wafer Transfer Technology for MEMS Adaptive Optics," ASME International Mechanical Engineering Congress and Exposition, Novel Micromachining Processes and Packaging for MEMS, New York, New York, November 2001.

2.        J. Mueller, E. H. Yang, A. Green, V. White, I. Chakraborty and R. Reinicke, "Design and Fabrication of MEMS-Based Micropropulsion Devices at JPL", Invited Paper, Reliability, Testing, and Characterization of MEMS/MOEMS, Proceedings of SPIE Vol. 4558, San Francisco, October (2001), pp. 57-71.

3.        J. Mueller, C. Marrese, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, and S. Vargo, “An Overview of MEMS-Based Micropropulsion Developments at JPL”, IAA-B3-1004, 3d International Symposium of the International Academy of Astronautics (IAA) for Small Satellites for Earth Observation, Berlin, Germany, April 2-6, 2001.

 

2000

1.        T. George, Y. Bae, I. Chakraborty, H. Cherry, C. Evans, F. Eyre, A. Hui, K.King, L.Kim, R.Lawtona, G. Lin, C.Marreseb, J.Mueller, J.Podosek, K.Shcheglov, T.Tang, T.VanZandt, S.Vargo, J.Wellmana, V.White, D.Wiberg and E. H. Yang, "MEMS Technology at NASA's Jet Propulsion Laboratory," Invited Paper, SPIE Int’l Symp. Optical Science and Technology, San Diego, July 30 - Aug. 4, 2000.

2.        E. H. Yang and D. V. Wiberg, "A New Wafer-Level Membrane Transfer Technique for MEMS Deformable Mirrors," IEEE International Conference on Microelectromechanical Systems (MEMS ’01) Conference, Interlaken, Switzerland, Jan. 2000, pp. 80-83.

3.        E. H. Yang, D. V. Wiberg, and Richard G Dekany, "Design and Fabrication of Electrostatic Actuators with Corrugated Membranes for MEMS Deformable Mirror in Space," SPIE Int’l Symp. Optical Science and Technology, Vol. 4091, San Diego, July 30 - Aug. 4, 2000, pp. 83-89.

 

1999

1.        E. H. Yang and H. Fujita, "Reshaping of Single Crystal Silicon Microstructures," Japanese Journal of Applied Physics, Part 1, Vol. 38, No 3A, pp. 1580-1583, March 1999

2.        P. Surbled, B. Le Pioufle, E. H. Yang, H. Fujita, "Shape Memory Alloys for Micromembranes Actuation", Europto Series (EOS/SPIE symposia), Munich (D), 14-18 June 1999, pp. 63-70.

 

1998

1.        E. H. Yang and H. Fujita, "Determination of the Modification of Young's Modulus due to Joule Heating of Microstructures Using U-Shaped Beams," Sensors and Actuators A, Vol. 70, pp.185-190, 1998.

2.        E. H. Yang, S. S. Yang and O. C. Jeong, "Fabrication and Electrostatic Actuation of Thin Diaphragms," KSME International Journal, Vol. 12, pp. 161-169, April 1998.

3.        E. H. Yang and H. Fujita, “Fabrication of Thin Film TiNi Shape Memory Alloy Microactuators for Optical Switching Applications," SPIE Micromachining and Microfabrication Conference, Microlectronic Structures and MEMS for Optical Processing IV, Vol. 3513, September 21-22, 1998.

 

1997

1.        E. H. Yang and H. Fujita, "Reshaping of Single Crystalline Silicon Microstructures for 3D MEMS," Micro Mechanics Europe 97 (MME 97), Southampton, England, Sept. 1997, pp. 67-70.

2.        E. H. Yang and H. Fujita, "Fabrication and Characterization of U-shaped Beams for the Determination of the Modification of Young's Modulus after Joule Heating of Polysilicon Microstructures," IEEE Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, USA, June 1997, pp. 603-606.

3.        E. H. Yang and H. Fujita, "Plastic Deformation of Single Crystalline Silicon Microstructures by Joule Heating," Sensor Symposium, Late News, Kawasaki, Japan, June 1997, p.L73.

4.        Y. Fukuta, D. Collard, T. Akiyama, E. H. Yang and H. Fujita," Microactuated Self-Assembling of 3D Polysilicon Structures with Reshaping Technology," IEEE International Conference on Microelectromechanical Systems (MEMS '97), Nagoya, Japan, Jan. 1997, pp. 477-481.

5.           E. H. Yang and H. Fujita, "Modification of Young's Modulus due to the Joule Heating of Polysilicon U-shaped Beams," IEEJ Annual Conference, Vol. 3, Kyoto, Japan, March, 1997, pp. 247-248.

 

1996

1.        E. H. Yang, S. W. Han and S. S. Yang, "Fabrication and Testing of a Pair of Passive Bivalvular Microvalves Composed of p+ Silicon Diaphragms," Sensors and Actuators A, Vol. 57, pp.75-78, 1996.

2.        E. H. Yang and S. S. Yang, "The Quantitative Determination of the Residual Stress Profile in Oxidized p+ Silicon Films," Sensors and Actuators A, vol.  54, pp. 684-686, June 1996.

3.        E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "Dynamic Characteristics of the Corrugated and the Flat p+ Diaphragms Actuated Electrostatically under Residual Stress)," International Mechanical Engineering Congress and Exposition (96 Winter Annual Meeting), Atlanta, U.S.A., DSC-Vol. 59, Nov. 1996, pp. 441-445.

 

1995

1.        E. H. Yang, S. S. Yang, S. W. Han and S. Y. Kim, "Fabrication and Dynamic Testing of Electrostatic Microactuators with p+ Diaphragms," Sensors and Actuators A, vol. 50, pp. 151-156, Dec.  1995.

2.        E. H. Yang, S. S. Yang and S. H. Yoo, "A Technique for Quantitative Determination of the Profile of the Residual Stress along the Depth of p+ Silicon Films," Applied Physics Letters, vol. 67 (7), 14, pp. 912-914, August 1995.

3.        E. H. Yang, S. S. Yang and S. H. Yoo, "Design and Fabrication of Electrostatic Microactuators with Silicon Diaphragms," Int. Workshop on Advanced Mechatronics, Cheju, Korea, Dec. 1995, pp. 247-256.

4.        E. H. Yang, S. S. Yang, S. W. Han, and S. Y. Kim, "Fabrication and Dynamic Testing of Electrostatic Microactuators with p+ Diaphragms," IEEE Region 10 Conference on Microelectronics and VLSI, Hong Kong, Nov. 1995, pp. 28-31.

5.        E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Micropump with p+ Diaphragms," Int. Symp. on Microsystems, Intelligent Materials and Robots, Sendai, Japan, Sept. 1995, pp. 106-109.

6.        E. H. Yang and S. S. Yang, "A New Technique for Quantitative Determination of the Stress Profile along the Depth of p+ Silicon Films," IEEE Int. Conf. Solid-State Sensors and Actuators, (Transducers ’95), Stockholm, Sweden, June 1995, pp. 68-71.

 

1994

1.        S. S. Yang, E. H. Yang, S. Y. Kim, J. D. Seo, and S. H. Yoo, "Fabrication of an Electrostatic Actuator and Passive Valves with p+ Diaphragms for Micropumps," ASME Winter Annual Meeting, DSC-vol. 55-2, Chicago, U.S.A., Nov. 1994, pp. 733-740.

 

KEYNOTE LECTURE AND INVITED PRESENTATIONS

 

1.        Engineered Carbon Nanotube and Graphene for Sensors, Actuators and Nanoelectronics, City College of New York, Sept. 2009

2.        P. A. Huang and  E. H Yang, “MEMS-based Warm Gas Thruster System for CubeSat Orbital Maneuver Applications,” SPIE Defense and Security Symposium, Space Exploration Technologies II, Conference 7331 - Proceedings of SPIE Volume 7331, Orlando, FL, April 2009.

3.        Piezoelectric Microactuators and Nanoelectronics for Space Applications, Ajou University, July 2008.

4.        Piezoelectric Microactuators and Nanoelectronics for Space Applications, ETRI, July 2008.

5.        Piezoelectric Microactuators and Nanoelectronics for Space Applications, Pusan National University, July 2008.

6.        Piezoelectric Microactuators and Nanoelectronics for Space Applications, Inje University, July 2008.

7.        Piezoelectric Microactuators and Nanoelectronics for Space Applications, POSTECH, July 2008.

8.        Piezoelectric Microactuators and Nanoelectronics for Space Applications, NASA Goddard Space Flight Center, Maryland, June 2008.

9.        Piezoelectric Microactuator Technologies for Space Applications, University of Arkansas, Fayetteville, AR, April 2008.

10.     High-Performance Piezoelectric Microactuator Technologies – Large-Stroke MEMS Deformable Mirror and High-Force Microvalve, DARPA/MTO Piezoelectric MEMS Workshop, San Francisco, CA, March 2008.

11.     Microfabricated Actuators for Space Applications, Keynote Speech, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK ’07), Vancouver, Canada, July 8-12, 2007.

12.     Piezoelectric Microactuator Technologies for Space Applications, NJIT, Feb. 2007.

13.     Piezoelectric Microactuator Technologies for Space Applications, Picatinny Arsenal, NJ, Feb. 2007.

14.     Piezoelectric Microactuators Technologies for Space Applications, Columbia University, Nov. 2006.

15.     Microactuators Technologies for Wavefront Correction in Space, Rutgers University, Oct. 2006.

16.     Development of Microactuators Technologies for Space Applications, Seoul National University, Seoul, Korea, July 2006.

17.     Development of Microactuators Technologies for Space Applications, Ihwa Woman’s University, Seoul, Korea, July 2006.

18.     Development of Microactuators Technologies for Space Applications, Ajou University, Suwon, Korea, July 2006.

19.     Development of Microactuators Technologies for Space Applications, IEEE Metropolitan LA Section General Membership Dinner Meeting, California Institute of Technology, Pasadena, CA, April, 2006.

20.     Development of Microactuators Technologies for Space Applications, Mechanical Engineering Seminar Series, Stevens Institute of Technology, Hoboken, NJ, March, 2006.

21.     Development of Microactuators Technologies for Space Applications, BSAC Lunch Time Seminar Series, University of California, Berkeley, November, 2005.

22.     Development of Microactuators Technologies for Space Applications, WIMS Center Seminar Series, NSF Engineering Research Center for Wireless Integrated MicroSystems at the University of Michigan, Ann Arbor, September 2005.

23.     Development of Microactuators Technologies for Space Applications” Lunch Time Seminar Series, Northrop Grumman Corporation, Woodland Hills, CA, August 2005.

24.     Development of Wavefront Corrector Technologies for Space Applications, NASA Mirror Tech Days 2005, Huntsville, Alabama, August 2005.

25.     Deployable Optical Mirror with Controlled Deformation, DARPA MTO Polymer MEMS Workshop, Washington DC, March 2~3, 2005.

26.     Adaptive Optics – MEMS Deformable Mirror Development at JPL, JPL Advanced Planning and Integration (APIO), Jet Propulsion Laboratory, Nov. 4, 2004.

27.     Development of Microactuators Technologies for Space Applications, Korea Advanced Institute of Science and Technology, June 1, 2005.

28.     Development of Microactuators Technologies for Space Applications, Guwangju Institute of Science and Technology, May 31, 2005.

29.     MEMS Actuators for Space Applications, JPL Division 32-38 Joint Seminar, Jet Propulsion Laboratory, April 2004.

30.     MEMS Actuators for Space Applications, Ajou University, August 2004.

31.     Large-Stroke Continuous Membrane Deformable Mirror for Medical Diagnosis, NASA Medical Technology Summit, Pasadena, Feb. 11-13, 2003.

32.     Variable Control MEMS Valve for Gas/Liquid Systems, EXPLORER WORKSHOP, Washington, DC, March 12, 2002.

33.     MEMS Adaptive Optics, EXPLORER WORKSHOP, Washington, DC, March 12, 2002.

34.     A Wafer Transfer Technology for MEMS Adaptive Optics, CfAO MEMS Workshop, CfAO, UC Berkeley, Feb. 2002.

35.     A Wafer Transfer Technique for MEMS Deformable Mirrors, MEMS Workshop for Adaptive Optics, CfAO, UC Berkeley, Nov. 2000.

36.     Electrostatic Actuators and Micropumps, Electronics and Telecommunication Research Institute, Oct. 1998.

37.     Reshaping-based Polysilicon and Single-Crystal Silicon Microactuator Technology, Korea Advanced Institute of Science and Technology, June, 1997.

38.     A Quantitative Determination of Stress Profiles along the Depth of Boron Doped Silicon Films, Samsung Electronics, March, 1996.

 

TECHNICAL PRESENTATIONS (Selected)

 

1.        K. Kumar, O. Sul, Y. T. Tsai, S. Strauf, F. Fisher, D. S. Choi and E. H. Yang, “Nanoscale Graphene and Carbon Nanotube Lithography using an Atomic Force Microscope” ASME International Mechanical Engineering Congress and Exposition, Lake Buena Vista, FL, Nov 2009.

2.        S. W. Lee, S. S. Lee and E. H. Yang, “Field Emission from Graphene Structures for Vacuum Transistor Applications,” ASME International Mechanical Engineering Congress and Exposition, Lake Buena Vista, FL, Nov 2009.

3.        O. Sul, S. Jang and E. H. Yang, “Characterization of Thermomechanical Properties of Polypyrrole Nanowires,” ASME International Mechanical Engineering Congress and Exposition, Lake Buena Vista, FL, Nov 2009.

4.       J. Su, E. H. Yang, T. Xu, R. M. Morgan, Z. Chang, “Active Membrane using Electrostrictive Graft Elastomer for Deployable and Lightweight Mirrors,”  SPIE Smart Structures and Materials and NDE for Health Monitoring and Diagnostics, San Diego, California USA, 18 – 22 March 2007.

5.        B. Yoo, Y. Rheem, C. Hangarter, E. H. Yang, and N. V. Myung, "Site-Specific Magnetic Assembly of Nanostructures for Sensor Arrays", ASME International Mechanical Engineering Congress and Exposition, Chicago, Nov 2006

6.           E. H. Yang, Y. Fukuta, T. Akiyama, D. Collard and H. Fujita, "Three-Dimensional Microstructures Fabricated by Reshaping of Silicon Thin Films," KIEE MEMS '98 Conference, Taejun, Korea, April 1998, pp. 235-244.

7.           E. H. Yang, F. Benoit, D. Collard and H. Fujita, "Realization and Determination of Reshaping Technology for 3 Dimensional MEMS," KIEE MEMS '97 Conference, Seoul, Korea, April 1997, pp. 33-48.

 

NASA TECH BRIEFS

 

1.        Z. Chang, R. M. Morgan, E.H. Yang, Y. Hishinuma, J. Su, and T.-B. Xu, “Adjustable Membrane Mirrors Incorporating G-Elastomers,” NASA Tech Briefs (NPO-45616)

2.        N.V. Myung, E.H. Yang, B.–Y. Yoo, Y. Rheem, and D.S. Choi, “Magnetically Assembled Nanowires,” (NPO-42952)

3.        D.S. Choi, Y. Bae, C. Ramsey, E.H. Yang, “Fabricating an Ordered Array of Nanometer-Scale Dots by Lift-off using a Thin Alumina Nanopore Template,” (NPO-42271)

4.        D.S. Choi, Y. Bae, C. Ramsey, E.H. Yang, “Fabrication of Copper Nanotubes by Electrodeposition,” (NPO-42261)

5.        E.H. Yang, “Re-Configurable, Segmented Silicon Telescope,” (NPO-42106)

6.        E.H. Yang, Y. Hishinuma, D. S. Choi, K. Shcheglov, “Amplification of Thermoionic Cooling Power Using Precision Metal Nanowire Arrays,” (NPO-42101)

7.        R. Toda and E. H Yang, “Four Point Latching Microactuator,” (NPO-42041)

8.        Y. Hishinuma and E. H Yang, “Large-Stroke Piezoelectric Unimorph Actuator” (NPO-41617)

9.        R. Toda and E. H Yang, “Latching-Type, Large Vertical Travel Inchworm Microactuator Array for Space Applications” (NPO-40749)

10.     R. Toda and E. H Yang, “Improved Design for a Vertical Inchworm Microactuator” (NPO-40480)

11.     E.H. Yang, B. M. Levine, R. Morgan, and Y. Bar-Cohen,  “Re-Configurable Large Optical Mirror in Space,” (NPO-40453)

12.     E.H. Yang, “Stress-Free Membrane Transfer Technique using XeFe2 Etching” (NPO-40276)

13.     E.H. Yang, K. Shcheglov, A. Ksendzov, and D. Wiberg, “MEMS Actuation for Optical Waveguide Switch”  (NPO-40200)

14.     W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Wireless Intraocular Pressure Sensor (WIPS)” (NPO-30861)

15.     D. S. Choi and E.H. Yang, “Embedded Longitudinal Nanochannels Transferred from Metal Nanowire Patterns” (NPO-30839)

16.     C. Lee and E.H. Yang, “Fabrication of Channels for Nanobiotechnological Devices” (NPO-30678) NASA Tech Briefs, vol. 28, No. 2, p. 52. (Nanotech Briefs vol. 1, No. 1, page 15, Jan. 2004.)

17.     E.H. Yang, “A MEMS-based Large Travel Inchworm Actuator with Nanometer Step Motion” (NPO-30672) NASA Tech Briefs, vol. 27, No. 6, p. 68.

18.     E.H. Yang, “A High Stroke Microvalve Actuated by Miniaturized Piezoelectric Bender Actuator for Miniaturized Liquid Systems with Particulates” (NPO-30563)   NASA Tech Briefs, vol. 27, No. 12, p. 54.

19.     E.H. Yang, “An Improved Design of Microvalve Actuated by Miniaturized Piezoelectric Stack for High Pressure Liquid System Applications “(NPO-30562)   NASA Tech Briefs, vol. 27, No. 12, p. 53.

20.     E.H. Yang, “Back actuators for segmented mirrors and other applications” (NPO-30550)

21.     E.H. Yang, “Micro-Ball-Lens Optical Switch Driven by SMA Actuator” (NPO-30434) NASA Tech Briefs, vol. 27, No. 1, p. 20a.

22.     E.H. Yang, “Making Precise Resonators for Mesoscale Vibratory Gyroscopes” (NPO-30431) NASA Tech Briefs, vol. 28, No. 6, p. 56.

23.     E.H. Yang, “Miniature Inchworm Actuators Fabricated by Use of LIGA” (NPO-30429) NASA Tech Briefs, vol. 27, No. 2, p. 9a.

24.     E.H. Yang and Larry Wild, “A Reactive Ion Etch Process for the High Selective Patterning of PZT Capacitor Films” (NPO-30349) NASA Tech Briefs, vol. 27, No. 1, p. 61.

25.     E.H. Yang, “Membrane Mirrors with Bimorph Shape Actuators” (NPO-30230) NASA Tech Briefs, vol. 27, No. 5, p. 10a.

26.     E.H. Yang and Larry Wild and Nishant Rohatgi, “Improvements in a Piezoelectrically Actuated Microvalve” (NPO-30338), NASA Tech Briefs, vol. 26, No. 3, p. 75. 

27.     E.H. Yang and D. Bame, “Improved Piezoelectrically Actuated Microvalve” (NPO-30158), NASA Tech Briefs, vol. 26, No. 1, p. 29. 

28.     E.H. Yang and D. Wiberg, “Silicon Membrane Mirrors with Electrostatic Shape Actuators” (NPO-21120) NASA Tech Briefs, vol. 27, No. 1, p. 62. 

29.     E.H. Yang and D. Wiberg, “A Wafer-Level Membrane-Transfer Process for Fabricating MEMS” (NPO-21088) NASA Tech Briefs, vol. 27, No. 1, p. 58. 

 

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Prof. E. H. Yang, Stevens Institute of Technology

스티븐스 공대, 양의혁 교수