Proposed New Course

ME 653 /Nano 652

Title: Design and Fabrication of Micro and Nanoelectromechanical Systems

Catalog Description: This course covers advanced topics in the design, modeling and fabrication of nano and micro electromechanical systems.  The materials will be broad and multidisciplinary including:  review of nano and microelectromechanic systems, design principles and methodologies, dimensional analysis and scaling, thermal, transport, fluids, microelectronics, feedback control, noises and electromagnetism at the micro and nanoscales; the modeling of a variety of new MEMS/NEMS devices; and alternative approaches to the continuum mechanics theory. The goal will be achieved through a combination of lectures, case studies, individual homework assignments, and design projects carried out in teams.

Prerequisites: ME 573

Cross-listing: ___________________________(show cross-listed course number(s)

Grading method: _ü__ ABCF ___ Pass/Fail ___ Other

Credits: _ü_ 3 credits ___ Other

For Graduate Credit _ü_ Yes ___ No ___ Not for Dept Majors ___ Other

Objective: Micro and nano electromechanical devices (MEMS/NEMS), such as pressure sensors, accelerometers, rate gyroscopes, and high frequency resonators, require knowlege of a broad range of disciplines, from microfabrication to mechanics to electromagnetism. A goal throughout the course will be to develop some physical intuition for the fundamental phenomena at these small scales, expose the students with a variety of domain knowledge and the tools necessary, and also the design methodologies. Through team work, the students will learn how to design a micro or nano system to meet a set of specifications using a realistic micro or nano fabrication process. Student exercises will develop skills in locating suitable information from libraries and electronic archives, visualizing of structures created with micro/nano fabrication process sequences, creating of low-order dynamical device models, and inserting of those models into the simulation of complete electronic measurement circuits.

Syllabus:

1. Intro to NEMS and MEMS

2. Micro fabrication process review

3. Nano fabrication processes

4. Design principles and methodologies, lumped Element Modeling

5. Continuum mechanics and stochastic methods

6. Dissipation and thermal energy

7. Fluids and transport in fluids

8. Microelectronics

9. Feedback control

10. Noise

11. Device Packaging and Integration

12. Nano sensors and actuators

13. Bio NEMS, High Q NEMS devices

Final Student Presentation

Textbook:

S. Senture, Microsystems Design

Mode of Delivery _ü_ Class ___ Online ___ Modules ___ Other

Department Ownership: ME

When first offered: Fall, 2006

Department Point of Contact: Prof. Yong Shi

Date approved by individual school curriculum committee: Wed. April 5, 2006

Grading

15% on homework

25 % on midterm quiz

35% on the final project

25% Final Exam