Micro Device Laboratory (MDL)

Slides for General Information about MDL

Lithography

1. Refrigerator:

2. Hot plate:

3. Convection oven:

4. Spin coater:

5. Mask aligner: Suss MicroTec MA/BA6

6. Wet bench:

Wet Etching

1. Wet bench:

Dry Etching

1. XeF2 etcher: XACTIX Xetch e1

2. Deep reactive ion etcher (DRIE): BMR DSE-200 Deep Silicon Etcher

3. Reactive ion etcher (RIE):

4. PR stripper/asher:

Deposition

1. Thermal evaporator: LADD Research filament evaporator

2. Plasma enhanced chemical vapor deposition (PECDV):

Characterization

1. Microscope:

2. Ellipsometer:

3. Profilometer:

4. Scanning electron microscope (SEM): FEI/Philips XL-40 Turbo SEM, SN D 639 (tungsten emission source, 30 keV)

5. Atomic force microscope (AFM):

6. Probe station:

7. Nanomanipulator: Zyvex KZ100

Miscellaneous

1. Spin dryer:

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